Refractive microlens arrays fabricated by reactive ion etching

机译：通过反应离子刻蚀制造的折射微透镜阵列

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Abstract: Reactive ion etching (RIE) is used to fabricate infrared refractive micro-optics in silicon. Three methods are used: binary optics technology which uses iterative steps of photolithography and RIE to create a multistep approximation to an aspheric profile; direct etching of a preshaped polymer microlens etch mask into the substrate; and analog etching of a lens profile directly into the substrate through a pinhole mask. !18

机译：摘要：反应离子刻蚀（RIE）用于在硅中制造红外折射微光学元件。使用三种方法：二元光学技术，它使用光刻和RIE的迭代步骤来创建非球面轮廓的多步近似；将预成形的聚合物微透镜蚀刻掩模直接蚀刻到基板中；通过针孔掩模将透镜轮廓直接蚀刻到基板上。！18

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《Miniature and Micro-Optics and Micromechanics》|1993年|p.283-292|共10页
会议地点 San Diego CA(US)
作者
Margaret B. Stern; Lincoln Lab./MIT; Lexington; MA; USA; Theresa Rubico Jay; Lincoln Lab./MIT; Lexington; MA; USA.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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3. Hexagonal microlens array fabricated by direct laser writing and inductively coupled plasma etching on organic light emitting devices to enhance the outcoupling efficiency [J] . Dengfeng Kuang, Xiaoliang Zhang, Min Gui, Applied optics . 2009,第5期

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4. Refractive microlens arrays fabricated by reactive ion etching [C] . Margaret B. Stern, Theresa Rubico Jay Conference on miniature and micro-optics and micromechanics . 1993

机译：由反应离子蚀刻制造的折射微透镜阵列
5. Shape Tuning of Silicon Nano-tip Arrays Through Reactive Ion Etching for Cold Field Emission [D] . Sankabathula, Giridhar Tulasi Ram. 2020

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6. Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching [O] . F. Zhang, C. Wang, K. Yin, -1

机译：飞秒激光辅助化学刻蚀制造的用于液体折射率传感的准周期凹微透镜阵列
7. Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching [O] . F. Zhang, C. Wang, K. Yin, 2018

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8. Dry Etching for Coherent Refractive Microlens Arrays [R] . Stern, M. B., Jay, T. R. 1994

机译：用于相干折射微透镜阵列的干蚀刻

Refractive microlens arrays fabricated by reactive ion etching

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