A NEW CONCEPT IN MAGNETIC FORCE MICROSCOPE CANTILEVERS

机译：磁力微悬臂梁的新概念

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In this paper, a new design of dedicated magnetic force microscope (MFM) cantilever is presented. In this design, the cantilever and the magnetic tip are realized in an integrated manufacturing process. The use of silicon micromachining techniques enables batch fabrication of several hundred cantilevers on a single Si wafer. The magnetic tip is prepared by deposition of magnetic material on a free standing silicon nitride layer. The width and thickness of the magnetic tip are defined by the thickness of the silicon nitride layer and the magnetic layer respectively. The length of the tip is lithographically defined. This enables us to realize very thin, high aspect ratio magnetic tips with excellent control over the tip dimensions.

机译：本文提出了一种新型的专用磁力显微镜（MFM）悬臂设计。在这种设计中，悬臂和磁头是在集成制造过程中实现的。硅微加工技术的使用能够在单个Si晶片上批量制造数百个悬臂。通过在独立的氮化硅层上沉积磁性材料来制备磁性尖端。磁性尖端的宽度和厚度分别由氮化硅层和磁性层的厚度限定。尖端的长度是光刻定义的。这使我们能够实现超薄，高纵横比的磁吸头，并且可以对吸头尺寸进行出色的控制。

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来源
《NATO Advanced Study Institute on Magnetic Storage Systems Beyond 2000, Jun 25-Jul 7, 2000, Rhodes, Greece》|2000年|p.307-312|共6页
会议地点 Rhodes(GR)
作者
A.G. VAN DEN BOS; A.C. J. VAN DIJK; I.R. HESKAMP; L. ABELMANN; J.C. LODDER;
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作者单位

Information Storage Technology Group, MESA~+ Research Institute, University of Twente P.O. Box 217, 7500 AE Enschede, The Netherlands;

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原文格式 PDF
正文语种 eng
中图分类自动化技术、计算机技术;
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专利

1. Viscoelastic measurements of single molecules on a millisecond time scale by magnetically driven oscillation of an atomic force microscope cantilever [J] . Kawakami M, Byrne K, Khatri BS, Langmuir: The ACS Journal of Surfaces and Colloids . 2005,第10期

机译：通过原子力显微镜悬臂的磁驱动振荡，在毫秒级上对单个分子进行粘弹性测量
2. Viscoelastic measurements of single molecules on a millisecond time scale by magnetically driven oscillation of an atomic force microscope cantilever [J] . Kawakami M, Byrne K, Khatri BS, Langmuir: The ACS Journal of Surfaces and Colloids . 2005,第10期

机译：通过原子力显微镜悬臂的磁驱动振荡，在毫秒级上对单个分子进行粘弹性测量
3. Design of a self-aligned, wide temperature range (300 mK-300 K) atomic force microscope/magnetic force microscope with 10 nm magnetic force microscope resolution [J] . Karci Ozgur, Dede Munir, Oral Ahmet Review of Scientific Instruments . 2014,第10期

机译：具有10 nm磁力显微镜分辨率的自对准，宽温度范围（300 mK-300 K）原子力显微镜/磁力显微镜的设计
4. A NEW CONCEPT IN MAGNETIC FORCE MICROSCOPE CANTILEVERS [C] . A.G. VAN DEN BOS, A.C. J. VAN DIJK, I.R. HESKAMP, NATO Advanced Study Institute on magnetic storage systems beyond . 2001

机译：磁力显微镜悬臂中的一个新概念
5. A novel vertically cantilevered magnetic force microscope [D] . DiCarlo, Anthony. 1992

机译：新型垂直悬臂磁力显微镜
6. Dynamic response of a cracked atomic force microscope cantilever used for nanomachining [O] . Haw-Long Lee, Win-Jin Chang 2012

机译：纳米加工裂纹原子力显微镜悬臂的动态响应
7. Viscoelastic Measurements of Single Molecules on a Millisecond Time Scale by Magnetically Driven Oscillation of an Atomic Force Microscope Cantilever [O] . -1

机译：通过原子力显微镜悬臂的磁驱动振荡毫秒刻度上的单分子的粘弹性测量

A NEW CONCEPT IN MAGNETIC FORCE MICROSCOPE CANTILEVERS

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