Thin film thickness variation measurement using dual LEDs and reflectometric interference spectroscopy model in biosensor

机译：在生物传感器中使用双LED和反射干涉光谱模型测量薄膜厚度变化

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The potential of thin film thickness variation measurement method, reflectometric interference spectroscopy (RIfS), for a compact label-free biosensor is investigated. A model to estimate thickness variation is built based on RIfS. A set-up of the sensor having dual Light Emitting Diodes (LEDs) and one photo detector are introduced. To verify the model, sample chips with different thicknesses of silica film layers ranging from 2 to 20nm are used in the experiment. The estimated values are compared with their reference values which are measured by an Atomic Force Microscopy (AFM). Since the chosen LEDs' wavelength is not an ideal one, the comparison shows that the model underestimates the thickness variation. By using dual LEDs and a photo detector with the reliable model, the handheld device for transparent thin film measurement will become practical.

机译：研究了薄膜厚度变化测量方法，反射干涉光谱法（RIfS）对于紧凑型无标签生物传感器的潜力。基于RIfS建立了一个估计厚度变化的模型。介绍了具有两个发光二极管（LED）和一个光电探测器的传感器的设置。为了验证模型，实验中使用了厚度范围为2至20nm的二氧化硅薄膜层的样品芯片。将估计值与参考值进行比较，参考值由原子力显微镜（AFM）测量。由于所选的LED波长不是理想波长，因此比较表明该模型低估了厚度变化。通过使用双LED和具有可靠型号的光电探测器，用于透明薄膜测量的手持设备将变得实用。

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《Optical fibers and sensors for medical diagnostics and treatment applications X》|2010年|P.75590K.1-75590K.7|共7页
会议地点 San Francisco CA(US)
作者
Yunfeng Ling; Nan Wu; Wenhui Wang; Leslie Farris; Byungki Kim; Xingwei Wang; Melisenda J. McDonald;
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作者单位

Dept. of Mechanical Eng., UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

Dept. of Electrical Computer Eng., UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

Dept. of Electrical Computer Eng., UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

Dept. of Chemistry, UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

Dept. of Mechanical Eng., UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

Dept. of Electrical Computer Eng., UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

Dept. of Chemistry, UMass Lowell, 1 University Ave., Lowell, MA USA 01854;

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原文格式 PDF
正文语种 eng
中图分类医用物理学;
关键词
film thickness measurement; reflectometric interference spectroscopy; light emitting diode (LED); biosensor;

机译：膜厚测量；反射干涉光谱发光二极管（LED）；生物传感器;

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专利

1. Measuring Thin Transparent Films Precisely: Reliability of reflectometric measurements for optical thickness determination [J] . Michael Quinten Vakuum in Forschung und Praxis . 2019,第1期

机译：精确测量薄透明薄膜：光学厚度测定的反射测量的可靠性
2. The Theoretical Concept of Polarization Reflectometric Interference Spectroscopy (PRIFS): An Optical Method to Monitor Molecule Adsorption and Nanoparticle Adhesion on the Surface of Thin Films [J] . László Janovák, Imre Dékány, Dániel Seb?k Photonics . 2019,第3期

机译：偏振反射干涉光谱法（PRIFS）的理论概念：一种监测薄膜表面上分子吸附和纳米颗粒粘附的光学方法
3. Reflectometric interference spectroscopy-based sensing for evaluating biodegradability of polymeric thin films [J] . Ooya Tooru, Sakata Yasuhiko, Choi Hyung Woo, Acta biomaterialia . 2016,第Null期

机译：基于反射干涉光谱的传感技术，用于评估聚合物薄膜的生物降解性
4. Thin film thickness variation measurement using dual LEDs and reflectometric interference spectroscopy model in biosensor [C] . Yunfeng Ling, Nan Wu, Wenhui Wang, SPIE Conference on Optical Fibers and Sensors for Medical Diagnostics and Treatment Applications . 2010

机译：薄膜厚度变化使用双LED和生物传感器反射干扰光谱模型测量
5. Structural characteristics of metal oxide thin films grown by pulsed laser deposition [and] fluorescence excitation spectroscopy of amino radical, fluoromethylene, and chlorocarbene under jet-cooled condition and measurement of fluorescence lifetime. [D] . Fan, Haiyan. 2004

机译：在脉冲冷却条件下通过脉冲激光沉积[和]自由基，氟代亚甲基和氯卡宾的荧光激发光谱和原子荧光测量方法生长的金属氧化物薄膜的结构特征，以及荧光寿命的测量。
6. Optimization of Porous Silicon Conditions for DNA-basedBiosensing via Reflectometric Interference Spectroscopy [O] . Fereshteh Rahimi, Somayeh Fardindoost, Naser Ansari-Pour, 2019

机译：基于DNA的多孔硅条件的优化通过反射干涉光谱进行生物传感
7. The Theoretical Concept of Polarization Reflectometric Interference Spectroscopy (PRIFS): An Optical Method to Monitor Molecule Adsorption and Nanoparticle Adhesion on the Surface of Thin Films [O] . László Janovák, Imre Dékány, Dániel Sebők 2019

机译：偏振反射干扰光谱（PRIFS）的理论概念：一种监测分子吸附和纳米粒子粘附在薄膜表面上的光学方法
8. Thickness Determination of Ultra-Thin Films by Auger Electron Spectroscopy. [R] . holloway, p. h. 1975

机译：俄歇电子能谱法测定超薄膜的厚度。

Thin film thickness variation measurement using dual LEDs and reflectometric interference spectroscopy model in biosensor

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