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Thin-film photosensor design and fabrication issues for liquid-crystal spatial-light modulators

机译:液晶空间光调制器的薄膜光电传感器设计和制造问题

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Abstract: Liquid crystal (LC) optically addressed spatial light modulators (OASLMs) have been successfully addressed with semiconductor thin film photosensors. Nematic liquid crystals (NLCs), which are insensitive to the polarity of the applied voltage, are addressed with photoconductive thin film structures having symmetric current-voltage characteristics. Much faster ferroelectric liquid crystals (FLC), which are polarity sensitive, are addressed with asymmetric photodiodes or photoconductive diodes. The highest performance OASLMs have been fabricated using FLCs and a-Si:H photodiodes as the photosensor. In this paper we analyze the role of the thin film photosensor in a LC OASLM and present design criteria. From these criteria we discuss hydrogenated amorphous silicon (a-Si:H) photosensor structures for use in OASLMs. In particular we review the a-Si:H p-i-n photodiode, the transparent conducting oxide (TCO)/intrinsic a-Si:H photoconducting diode, and the metal/insulator/a-Si:H structures which have been successfully incorporated into FLC OASLMs, and the n-i-n photoconductor which has not.!26
机译:摘要:液晶(LC)光学寻址的空间光调制器(OASLM)已成功地应用于半导体薄膜光电传感器。对具有所施加电压的极性不敏感的向列液晶(NLC)用具有对称电流-电压特性的光电导薄膜结构来解决。极性敏感的更快的铁电液晶(FLC)可通过非对称光电二极管或光电导二极管解决。使用FLC和a-Si:H光电二极管作为光电传感器,可以制造出性能最高的OASLM。在本文中,我们分析了薄膜光电传感器在LC OASLM中的作用并提出了设计标准。根据这些标准,我们讨论了用于OASLM的氢化非晶硅(a-Si:H)光传感器结构。特别是,我们回顾了已成功整合到FLC OASLM中的a-Si:H引脚光电二极管,透明导电氧化物(TCO)/本征a-Si:H光电导二极管以及金属/绝缘体/ a-Si:H结构,还有没有的nin光电导体。

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