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首页> 外文会议>Photonics, devices, and systems V >Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure
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Application of infrared ATR ellipsometry for measurement of solid samples: Calibration procedure

机译：红外ATR椭圆仪在固体样品测量中的应用：校准程序

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摘要

Attenuated total reflection (ATR) is widely used in infrared spectral range for measurement of surface properties of solid samples, powders, and liquids. In this paper we use a commercial Fourier-transform infrared (FTIR) spectrometer Vertex 70v from Bruker company equipped with the ATR Golden Gate accessory from Specac. To increase sensitivity of the method we included infrared polarizer and analyzer, which enable measurement of the reflected amplitudes ratio and the phase differences between p- and s-polarizations in the frame of the ATR ellipsometry. Procedure of ellipsometric angles measurement is proposed using data acquisition at several azimuthal angles of polarizers. Spectral dependence of real polarizer extinction ratio, partial polarization of beam coming from the interferometer and polarization sensitivity of infrared detector are presented.
机译：衰减全反射（ATR）广泛用于红外光谱范围，用于测量固体样品，粉末和液体的表面性质。在本文中，我们使用来自Bruker公司的商用傅立叶变换红外（FTIR）光谱仪Vertex 70v，配备了Specac的ATR Golden Gate附件。为了增加该方法的灵敏度，我们包括了红外偏振器和分析仪，它们能够在ATR椭圆偏振仪的框架内测量反射振幅比以及p偏振和s偏振之间的相位差。提出了在偏振器的几个方位角上进行数据采集的椭圆偏振角测量程序。给出了实际偏振片消光比的光谱依赖性，来自干涉仪的光束的部分偏振以及红外探测器的偏振灵敏度。

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  • 来源
    《Photonics, devices, and systems V》|2011年|p.83060S.1-83060S.7|共7页
  • 会议地点 Prague(CS)
  • 作者

    Zuzana Mrazkova; David Hrabovsky; Kamil Postava; Jaromir Pistora;

  • 作者单位

    Nanotechnology Centre and Department of Physics, Technical University of Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic;

    Nanotechnology Centre and Department of Physics, Technical University of Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic;

    Nanotechnology Centre and Department of Physics, Technical University of Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic;

    Nanotechnology Centre and Department of Physics, Technical University of Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程光学;
  • 关键词

    ATR ellipsometry; polarization sensitivity; FTIR spectrometry;

    机译：ATR椭圆仪；极化灵敏度FTIR光谱法;

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