Evaluation of Al_2O_3 Films for MANOS Memory Device with Oxygen Infusion by Gas Cluster Ion Beam

著录项

• 来源
  《Physics and technology of high-k materials 9》|2011年|p.109-114|共6页
• 会议地点 Boston MA(US);Boston MA(US)
• 作者

  K. Nagata; H. Hashiguchi; T. Yamaguchi; A. Ogura; H. Oji; J. Son; I. Hirosawa; Y. Tanaka; Y. Hirota; J. Gumpher; K. Yamashita;

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• 作者单位

  School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571, Japan,Research Fellow of the Japan Society for the Promotion of Science, 8 Ichiban-cho, Chiyoda-ku, Tokyo, 102-8472, Japan;

  School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571, Japan;

  School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571, Japan;

  School of Science and Technology, Meiji University, 1-1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 214-8571, Japan;

  Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan;

  Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan;

  Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan;

  TOKYO ELECTRON LTD., Yamanashi Regional Office (Hosaka),650 Mitsuzawa, Hosaka-cho, Nirasaki City, Yamanashi 407-0192;

  TOKYO ELECTRON LTD., Yamanashi Regional Office (Hosaka),650 Mitsuzawa, Hosaka-cho, Nirasaki City, Yamanashi 407-0192;

  TEL EPION INC., 37 Manning Road, Billerica, MA 01821, USA;

  TEL EPION INC., 37 Manning Road, Billerica, MA 01821, USA;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 半导体技术;
• 关键词