INFLUENCE OF FINE ACTUATOR STIFFNESS IN DUAL STAGE ACTUATION ON VIBRATION ISOLATION PROPERTIES

机译：二级执行机构中精细执行机构的刚度对隔振性能的影响

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This paper investigates the effect of the fine actuator stiffness of a DSA system on active vibration isolation to provide design guidelines to select or design the actuator. A vibration isolation requirement with respect to stiffness has been related to the required control bandwidth of the fine actuation, since this is usually limited by the first or second mechanical resonance at the feedback controller design. This relation is graphically presented after it is obtained by using the H_∞ controller design and simulation. As a result, simple design guidelines are proposed to determine stiffness to achieve good vibration isolation.

机译：本文研究了DSA系统的精细执行器刚度对主动隔振的影响，以提供选择或设计执行器的设计指南。关于刚度的振动隔离要求已经与精细致动的所需控制带宽有关，因为这通常受到反馈控制器设计上的第一或第二机械共振的限制。通过使用H_∞控制器设计和仿真获得该关系后，将以图形方式呈现该关系。因此，提出了简单的设计准则来确定刚度以实现良好的隔振效果。

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来源
《Precision control for advanced manufacturing systems》|2013年|126-130|共5页
会议地点 Cambridge MA(US)
作者
Shingo Ito; Juergen Steininger; Georg Schitter;
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Automation and Control Institute (ACIN) Vienna University of Technology Vienna, Austria;

Automation and Control Institute (ACIN) Vienna University of Technology Vienna, Austria;

Automation and Control Institute (ACIN) Vienna University of Technology Vienna, Austria;

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INFLUENCE OF FINE ACTUATOR STIFFNESS IN DUAL STAGE ACTUATION ON VIBRATION ISOLATION PROPERTIES

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