• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Comparison and Classification of High-Precision Actuators Based on Stiffness Influencing Vibration Isolation
【24h】

Comparison and Classification of High-Precision Actuators Based on Stiffness Influencing Vibration Isolation

机译：基于刚度影响隔振的高精度执行器比较与分类

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Positioning performance of high-precision systems is influenced by vibrations transmitting from floors and types of the precision actuators. To construct a compact actuator with high vibration isolation for these systems, this paper investigates and categorizes precision actuators based on their stiffness for providing design rules. The effectiveness of the analysis and the design rules is confirmed by experiments comparing two types of compact precision actuators: piezoelectric and electromagnetic (Lorentz or voice coil) actuators. The positioning system with these actuators is validated experimentally by applying step-like disturbances of approximately 160 nm to the base of the actuators. While the position error of the piezo-actuated system swings by about 200 nm, the Lorentz-actuated system that satisfies the design rules is able to suppress the error within a range of 10 nm.
机译：高精度系统的定位性能受地板传来的振动和精密执行器类型的影响。为了为这些系统构建具有高隔振性能的紧凑型执行器，本文基于其执行度对精密执行器进行了调查和分类，以提供设计规则。通过比较两种紧凑型精密致动器的实验，证实了分析和设计规则的有效性：压电和电磁（洛伦兹或音圈）致动器。通过将大约160 nm的阶梯状干扰施加到执行器的基座上，实验验证了带有这些执行器的定位系统。压电致动系统的位置误差摆幅约为200 nm时，满足设计规则的洛伦兹致动系统可以将误差抑制在10 nm范围内。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号