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首页> 外文会议>Proceedings of 4th International Workshop on Piezoelectric Materials and Applications in Actuators >Fundamental flexural vibrations of piezoelectric tubes with mass loads in ultrasonic actuators
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Fundamental flexural vibrations of piezoelectric tubes with mass loads in ultrasonic actuators

机译：超声波执行器中具有质量载荷的压电管的基本挠曲振动

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摘要

The ultrasonic actuators with piezoelectric ceramic tubes have been used in ultrasonic motors, scanning tunneling microscopes (STM) and atomic force microscopes (AFM) recently.In which,high precision micro-positioning technology is essential;which are required to provide the motion in nanometer scales with high accuracy,speed,and load capacity.Actually,improvements of these performances mainly depend on resonance vibrations of the piezoelectric ceramic tubes.In this paper,based on Timoshenko beam model,the fundamental flexural vibration shape of radially polarized piezoelectric ceramic tubes is investigated.Then using Rayleigh energy theory,analytical formulas of the fundamental flexural resonance frequencies are developed.In the paper,particular attentions are devoted to effects of the mass loads at two ends on flexural resonance frequencies.Changing the sizes of the tubes and the mass loads,the variations of the flexural resonance frequencies of the piezoelectric ceramic tubes are calculated theoreticall.To verify accuracy of the analytical formulas,the flexural resonance frequencies for different lengths of the tubes and different mass loads are measured experimentally.The theoretical results agree well with the experimental measurement,which demonstrates that the analytical formulas are accurate for analyzing the flexural resonance frequencies of the piezoelectric ceramic tubes with mass loads at free ends.
机译：近年来，带压电陶瓷管的超声波致动器已被用于超声波马达，扫描隧道显微镜（STM）和原子力显微镜（AFM）。其中，高精度的微定位技术是必不可少的；提供纳米级运动是必需的。实际上，这些性能的提高主要取决于压电陶瓷管的共振。本文基于Timoshenko梁模型，径向极化压电陶瓷管的基本挠曲振动形状为然后利用瑞利能量理论，建立了基本挠曲共振频率的解析公式。本文着重研究了两端的质量载荷对挠曲共振频率的影响。改变了管子的尺寸和质量负载时，压电陶瓷管的弯曲共振频率的变化为为了验证分析公式的准确性，对不同长度的管子和不同质量载荷的挠曲共振频率进行了实验测量。理论结果与实验测量结果吻合良好，这表明分析公式对于分析管件是准确的。在自由端具有质量载荷的压电陶瓷管的挠曲共振频率。

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