Development of wet chemical processing in nippon sheet glass

机译：日本平板玻璃湿法化学处理的发展

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The liquid phase deposition (LPD) is a film coating process developed in Nippon Sheet Glass (NSG). Silica thin film can be grown by an equilibrium reaction in aqueous solution. The formation of silica film on a glass substrate w as found in hexafluorosilisic acid (H2SiF6) solution supersaturated with silica in 1982. The film thus obtaiind showed extremely smooth surface and high density while formed at near room temperature. The LPD has been applied to the process of a manufacturing substrate glass for a liquid crystal display (LCD) since 1986. Recently, another application of the LPD has been proposed in the fabrication process of ULSI circuits. We found organic dye-doped silica films can be a lso prepared by the LPD. NSG has been developing in the various industrial applications.

机译：液相沉积（LPD）是在日本平板玻璃（NSG）中开发的薄膜涂覆工艺。二氧化硅薄膜可以通过在水溶液中的平衡反应来生长。 1982年，在六氟硅酸（H2SiF6）溶液中过氧化硅时，在玻璃基板上形成了氧化硅膜。当在接近室温的条件下形成时，这样的膜显示出极其光滑的表面和高密度。自1986年以来，LPD已应用于制造用于液晶显示器（LCD）的基板玻璃的过程中。最近，LPD已在ULSI电路的制造过程中提出了另一种应用。我们发现有机染料掺杂的二氧化硅薄膜可以由LPD制备。 NSG已经在各种工业应用中发展。

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来源
《Proceedings of the First International Conference on Application and Commercialization of Sol-Gel Processing, Saarbruecken, Germany》||p.177-183|共7页
会议地点 Saarbrucken(DE)
作者
K.Takemura; K.Doushita; K.Yokoi; T.Mizuno;
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原文格式 PDF
正文语种 eng
中图分类化学工业;
关键词
Liquid Phase Deposition (LPD); SIlica Film; Alkali; Diffusion Barrier; Sol-Gel method; Ultra-Thin SIlica Glass Flake; STitania Dispersed Ultra-Thin Silica Glass Flake; Photocatalytic Activity;

机译：液相沉积（LPD）; SIlica电影；碱;扩散壁垒溶胶凝胶法;超薄SIlica玻璃鳞片; STitania分散超薄二氧化硅玻璃鳞片；光催化活性;

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1. Development of Wet Chemical Processing in Nippon Sheet Glass [J] . K. Takemura, K. Doushita, K. Yokoi Key Engineering Materials . 1998,第期

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2. Nippon sheet glass development in heat-isolating glass [J] . Glass-technology international . 1999,第4期

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3. Chemical Modification on Woven Jute and Nonwoven Wet-Laid Glass Fiber Sheet Reinforced Poly-(&i&ε&/i&-Caprolactone) Composites [J] . Mohammad Muzammel Hossen, Mohammad Obaidur Rahman Open Journal of Composite Materials . 2021,第4期

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4. Development of wet chemical processing in nippon sheet glass [C] . K.Takemura, K.Doushita, K.Yokoi, International conference on application and commercialization of Sol-Gel processing . 1998

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7. New Developments in Chemical Wet Processes. Microfabrication Based on Self-assembled Monolayer Resists and Wet-chemical Processes. [O] . Hiroyuki SUGIMURA, Osamu TAKAI 2001

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Development of wet chemical processing in nippon sheet glass

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