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首页> 外文会议>Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; Proceedings of SPIE-The International Society for Optical Engineering; vol.6463 >Process engineering and failure analysis of MEMS and MOEMS by Digital Holography Microscopy (DHM)
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Process engineering and failure analysis of MEMS and MOEMS by Digital Holography Microscopy (DHM)

机译：通过数字全息显微镜（DHM）对MEMS和MOEMS进行工艺设计和故障分析

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摘要

Process engineering and failure analysis of MEMS and MOEMS require static and dynamical characterization of both their in-plane and out of plane response to an excitation. A remarkable characteristic of Digital Holography Microscopes (DHM) is the extremely short acquisition time required to grab the whole information necessary to provide 3D optical topography of the sample: a unique frame grab, without any vertical or lateral scan provides the information over the full field of view. First, it ensures DHM measurements to be insensitive to vibrations. Second, it opens the door to fast dynamical characterization of micro-systems. For periodic movement analysis, DHM can operate in stroboscopic mode with standard cameras. It enables precise characterization up to excitation frequencies of 100 kHz with recovery cycle of 10% simply by triggering properly the camera. Pulsed sources can be used for investigation of higher excitation frequencies. For non periodic movement analysis fast acquisition cameras and postponed treatment are used. DHM are therefore unique and very efficient tool for dynamical characterization of in-plane and out-of-plane response. In this paper we show the basics of the technology and illustrate process engineering and failure analysis using DHM with an example of in and out of plane characterization of movements of a variable capacitor using the stroboscopic mode of acquisition.
机译：MEMS和MOEMS的过程工程和故障分析要求对激励的面内和面外响应进行静态和动态表征。数字全息显微镜（DHM）的显着特点是，获取样品的3D光学形貌所必需的全部信息所需的采集时间极短：独特的帧抓取，无需任何垂直或横向扫描即可提供整个视野的信息看法。首先，它确保DHM测量对振动不敏感。其次，它为微系统的快速动态表征打开了一扇门。对于周期性运动分析，DHM可以使用标准摄像机以频闪模式运行。只需正确触发摄像机，它就可以精确表征高达100 kHz的激励频率，恢复周期为10％。脉冲源可用于研究更高的激励频率。对于非周期性运动分析，使用快速采集相机和延迟处理。因此，DHM是用于动态表征平面内和平面外响应的独特且非常有效的工具。在本文中，我们展示了该技术的基础知识，并举例说明了使用DHM进行的工艺工程和故障分析，并使用频闪观测模式对可变​​电容器的运动进行了平面内和平面外表征。

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