Impact of failure criteria on electromigration of W-plug contact

机译：失效标准对W插头触点电迁移的影响

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This work presents an investigation of the impact of failurencriteria on electromigration of a W-plug contact by using highnresolution resistance measurement (HRRM). It is found that the medianntime to failure, T₅₀, linearly increases with an increasingnfailure criterion, while the shape parameter, σ, shows littlenchange. The choice of failure criterion has a significant impact on thenactivation energy E_a calculated based on the resistancenmeasurement. It has been demonstrated that this impact is an artificialnresult due to calculation without taking the ambient temperaturendependent effects into account. The actual E_a is found to ben0.78 eV, independent of the failure criterion. It suggests thatninterfacial diffusion, rather than bulk diffusion, is a primarynmechanism of bamboo structures in EM measurements

机译：这项工作通过使用高分辨率电阻测量（HRRM）提出了故障准则对W插头触点电迁移影响的研究。结果表明，失效时间的中位数T _{50 随着失效准则的增加而线性增加，而形状参数σ几乎没有变化。失效准则的选择对基于电阻测量法计算出的活化能E _{a 有重要影响。已经证明，这种影响是人为的，由于计算而没有考虑环境温度相关的影响。实际的E _{a 被发现为ben0.78 eV，与失效准则无关。这表明在电磁测量中，界面扩散而不是整体扩散是竹结构的主要机制。}}}

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《Requirements Engineering (RE 2007)》|2007年|p.123-127|共5页
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作者
Guo Qiang; Lo Keng Foo; Zeng Xu; Liu Xu; Yao Pei; Tan Pee Ya;
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Chartered Semicond. Manuf. Ltd.;

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正文语种 eng
中图分类自动化技术、计算机技术;
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机译：小型互连中的蠕变和触点断开电迁移故障
2. AC and DC Electromigration Failure of Aluminum Contact Junctions [J] . Jesse Aronstein, Thomas K. Hare IEEE Transactions on Components and Packaging Technologies . 2005,第4期

机译：铝触点的交流和直流电迁移失效
3. Analysis of top- and side-contact MLGNR interconnects: impact on crosstalk, stability, and electromigration [J] . Vijay Rao Kumbhare, Punya Prasanna Paltani, Manoj Kumar Majumder Journal of Computational Electronics . 2020,第4期

机译：分析顶部和侧面触点MLGNR互连：对串扰，稳定性和电迁移的影响
4. Impact of failure criteria on electromigration of W-plug contact [C] . Guo Qiang, Lo Keng Foo . 1999

机译：失效标准对W插头触点电迁移的影响
5. Electrical contacts to individual nanostructures and fabrication of nanoscale gaps by feedback controlled electromigration. [D] . Johnston, Danvers Errol. 2008

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Impact of failure criteria on electromigration of W-plug contact

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