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首页> 外文会议>Simulation of semiconductor processes and devices 1998(SISPAD98) >Methods for model generation and parameter extraction for MEMS
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Methods for model generation and parameter extraction for MEMS

机译：用于MEMS的模型生成和参数提取的方法

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摘要

A strategy for compact modeling is presented, that takes into account the specific problems associated with the development and production of microelectromechanical devices and systems (MEMS). For a MEMS compact model, a set of basis functions is derived from a continuous field model description by proper approximations. This set should represent all relevant coupling effects that determine the device operation, and the most important parasitic effects. The remaining less important effects are taken into account by means of data fitting. The corresponding model parameter extraction process uses direct extraction techniques and well tuned local optimization steps for those parameters of the basis functions, which represent physical, technological or geometrical properties. Local and global optimization steps are used to determine the remaining fit parameters. This results in an effort-optimized modeling approach, which is suitable for statistical modeling and yield analysis, and can be automated in a CAD-toolset.
机译：提出了一种紧凑建模的策略，该策略考虑了与微机电设备和系统（MEMS）的开发和生产相关的特定问题。对于MEMS紧凑模型，通过适当的近似从连续的场模型描述中得出了一组基函数。该集合应代表决定器件工作的所有相关耦合效应，以及最重要的寄生效应。剩余的次要影响通过数据拟合得到考虑。相应的模型参数提取过程对基本函数的那些参数使用直接提取技术和经过微调的局部优化步骤，这些参数代表物理，技术或几何特性。局部和全局优化步骤用于确定剩余的拟合参数。这导致了一种工作量优化的建模方法，该方法适用于统计建模和收益分析，并且可以在CAD工具集中实现自动化。

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