A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR

机译：平的高频扫描微镜

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We present the Staggered Torsional Electrostatic Combdrivern(STEC) fabrication process that creates thick mirrors with hightorquernactuators, thereby allowing high-speed optical scanningrnwith large angular deflections. We have demonstrated a 550 pmdiameterrnmirror capable of scanning an optical angle of 24.9° at itsrn34 kHz resonant frequency with less than 30 nm static andrndynamic deformation. The optical resolution is 350 pixels - veryrnnear the diffraction-limited resolution of 355 pixels with 655 nmrnwavelength light.

机译：我们提出了交错扭转静电梳状驱动器（STEC）的制造工艺，该工艺可制造带有高扭矩致动器的厚镜，从而实现具有大角偏转的高速光学扫描。我们已经证明了550 pm直径的反射镜，能够在其34 kHz共振频率下扫描24.9°的光学角，且静态和动态变形小于30 nm。光学分辨率为350像素-非常接近655 nm波长光的355像素的衍射极限分辨率。

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来源
《Solid-state sensor and actuator workshop : Technical digest》|2000年|p.6-9|共4页
会议地点 Hilton Head Island SC(US)
作者
Robert A. Conant; Jocelyn T. Nee; Kam Y. Lau; Richard S. Muller;
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作者单位

Berkeley Sensor Actuator Center, University of California, BerkeleyrnBerkeley, CA 94720-1774;

Berkeley Sensor Actuator Center, University of California, BerkeleyrnBerkeley, CA 94720-1774;

Berkeley Sensor Actuator Center, University of California, BerkeleyrnBerkeley, CA 94720-1774;

Berkeley Sensor Actuator Center, University of California, BerkeleyrnBerkeley, CA 94720-1774;

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正文语种 eng
中图分类 TM938.865;
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1. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning [J] . Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann, Micromachines . 2017,第7期

机译：具有大扫描角度的PZT致动和感应谐振微镜，采用机械杠杆放大技术进行双轴扫描
2. Laser Scanning Feedback Imaging System Based on Digital Micromirror Device [J] . Wang Yifan, Zhu Kaiyi, Lu Yueyue, IEEE Photonics Technology Letters . 2020,第3期

机译：基于数字微镜装置的激光扫描反馈成像系统
3. Validating the Critical Point of Spontaneous Parametric Downconversion for Over 600 Scanning MEMS Micromirrors on Wafer Level [J] . Ulrike Nabholz, Florian Stockmar, Jan E. Mehner, IEEE Sensors Letters . 2020,第1期

机译：在晶片级上验证超过600扫描MEMS微镜的自发参数下变频的临界点
4. Simplified monolithic process for fabricating low-cost, high-frequency, high-flatness scanning micromirrors [C] . Chui B.W., Sun T., Lim R., International Conference on Solid-State Sensors, Actuators and Microsystems . 2013

机译：用于制造低成本，高频，高平坦度扫描微镜的简化整体工艺
5. Dynamic focus-tracking MEMS scanning micromirror for an endoscopic, optical coherence tomography based imaging system. [D] . Strathman, Matthew. 2014

机译：动态聚焦跟踪MEMS扫描微镜，用于基于内窥镜，光学相干断层扫描的成像系统。
6. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning [O] . Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, 2017

机译：具有大扫描角度的PZT致动和感应谐振微镜采用机械杠杆放大技术进行双轴扫描
7. Surface-micromachined 2D optical scanners with optically flat singlecrystalline silicon micromirrors [O] . Guo-dung J. Su, Student Member, Hiroshi Toshiyoshi, 2001

机译：具有光学平坦单晶硅微镜的表面微加工2D光学扫描仪

A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR

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