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THE POLYCHROMATOR:A PROGRAMMABLE MEMS DIFFRACTION GRATING FOR SYNTHETIC SPECTRA

机译:聚合器:用于合成光谱的可编程MEMS衍射光栅

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摘要

We report here the design, fabrication and demonstration ofrnan electrostatically actuated MEMS diffractive optical device, thernPolychromator grating. The Polychromator grating enables a newrntype of correlation spectrometer for remote detection of a widernrange of chemical species, offering electronic programmability,rnhigh specificity and sensitivity, fast response and ruggedness.rnSignificant results include: (1) The first demonstrations of userdefinedrnsynthetic spectra in the 3 - 5 μm wavelength regime basedrnupon controlled deflection of individual grating elements in thernPolychromator grating; (2) The first demonstration of gasrndetection by correlation spectroscopy using synthetic spectrarngenerated by the Polychromator grating.
机译:我们在这里报告rnan静电驱动MEMS衍射光学器件thenPolychromator光栅的设计,制造和演示。 Polychromator光栅使新型相关光谱仪能够远程检测更广泛的化学物种,提供电子可编程性,高特异性和灵敏度,快速响应和坚固性。重要结果包括:(1)首次展示了用户定义的3-合成光谱基于5μm波长范围的rnr在多色仪光栅中的单个光栅元件的偏转控制; (2)使用多色仪光栅产生的合成光谱通过相关光谱进行气体检测的第一个演示。

著录项

  • 来源
  • 会议地点 Hilton Head Island SC(US)
  • 作者单位

    Honeywell Technology Center Plymouth, MN 55441-4799;

    Honeywell Technology Center Plymouth, MN 55441-4799;

    Massachusetts Institute of Technology Cambridge, MA 02139;

    Massachusetts Institute of Technology Cambridge, MA 02139;

    Massachusetts Institute of Technology Cambridge, MA 02139;

    Sandia National Laboratories Albuquerque, NM 87 185;

    Sandia National Laboratories Albuquerque, NM 87 185;

    Sandia National Laboratories Albuquerque, NM 87 185;

    ACLARA Biosciences Mountain View, CA 94043;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 TM938.865;
  • 关键词

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