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Polychromator: A Programmable Mems Diffraction Grating for Synthetic Spectra

机译：多色仪：用于合成光谱的可编程mems衍射光栅

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The authors report here the design, fabrication and demonstration of an electrostatically actuated MEMS diffractive optical device, the Polychromator grating. The Polychromator grating enables a new type of correlation spectrometer for remote detection of a wide range of chemical species, offering electronic programmability, high specificity and sensitivity, fast response and ruggedness. Significant results include: (1) The first demonstrations of user-defined synthetic spectra in the 3-5 (micro)m wavelength regime based upon controlled deflection of individual grating elements in the Polychromator grating; (2) The first demonstration of gas detection by correlation spectroscopy using synthetic spectra generated by the Polychromator grating.

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作者
Hocker, G. B. ; Youngner, D. ; Butler, M. A. ; Sinclair, M. B. ; Plowman, T. S.;
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年度 2000
页码 1-6
总页数 6
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Semiconductors; Meetings; Energy; Fabrication; Electrostatics; Optical systems; Spectrometers; Spectrum analysis; Chemical compounds; Wavelengths; Deflection; Gratings(Spectra);

机译：半导体;会议;能源;钣金及结构件;静电学;光学系统;光谱仪;光谱分析;化学化合物;波长;偏转;光栅（光谱）;

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专利

1. Analysis of light wave diffraction and amplification by reflection grating operating in the second-order Bragg regime. 2. Reflectivity and spectral characteristics of a grating [J] . Fitio V.M., Smirnova T.N. Journal of the Optical Society of America, B. Optical Physics . 2012,第5期

机译：通过在二阶布拉格状态下运行的反射光栅分析光波的衍射和放大。 2.光栅的反射率和光谱特性
2. The spectral combination characteristic of grating and the bi-grating diffraction imaging effect [J] . ZHANG WeiPing, HE XiaoRong Science in China. Series G, Physics, Mechanics & Astronomy . 2007,第1期

机译：光栅的光谱组合特性和双光栅衍射成像效果
3. The spectral combination characteristic of grating and the bi-grating diffraction imaging effect [J] . ZHANG WeiPing, HE XiaoRong 中国科学:物理学力学天文学（英文版） . 2007,第001期

机译：光栅的光谱组合特性及双光栅衍射成像效果
4. THE POLYCHROMATOR:A PROGRAMMABLE MEMS DIFFRACTION GRATING FOR SYNTHETIC SPECTRA [C] . G. B. Hacker, D. Youngner, E. Deutsch, Solid-state sensor and actuator workshop : Technical digest . 2000

机译：聚合器：用于合成光谱的可编程MEMS衍射光栅
5. Creation of vector beams from a polarization diffraction grating using a programmable liquid crystal spatial light modulator and a q-plate. [D] . Badham, Katherine Emily. 2016

机译：使用可编程液晶空间光调制器和q板从偏振衍射光栅创建矢量束。
6. MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications [O] . Sanathanan S. Muttikulangara, Maciej Baranski, Shakil Rehman, 2017

机译：用于星载成像光谱应用的MEMS可调衍射光栅
7. XMEMS: Dynamic Diffraction Gratings by MEMS Technology for X-ray Imaging Applications [O] . Gorelick Sergey 2012

机译：XMEMS：MEMS技术的动态衍射光栅，用于X射线成像应用

Polychromator: A Programmable Mems Diffraction Grating for Synthetic Spectra

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