首页> 外文会议>Symposium on Nanophase and Nanocomposite Materials III held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. >Controlled growth of amorphous silicon nanowires via a solid-liquid-solid (SLS) mechanism
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Controlled growth of amorphous silicon nanowires via a solid-liquid-solid (SLS) mechanism

机译:通过固液固(SLS)机制控制非晶硅纳米线的生长

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Amorphous silicon nanowires (a-SiNW's) with average diameter around 20 nm were synthesized at about 950 deg C under an Ar/H_2 atmosphere on large area of a (111) Si substrate without supplying any gaseous or liquid Si sources. The Si substrate, deposited with a layer of Ni of about 40 nm thick, served itself as a silicon source for the growth of the a-SiNWs. Different from the well-known vapor-liquid-solid (VLS) for conventional whisker growth, it was found that growth of the a-SiNWs was controlled by a solid-liquid-solid mechanism, which is analogous to the VLS model.
机译:在Ar / H_2气氛下,在(111)Si基板的大面积上,在不提供任何气态或液态Si源的情况下,在约950摄氏度下合成了平均直径约为20 nm的非晶硅纳米线(a-SiNW)。沉积有约40 nm厚的Ni层的Si衬底本身用作a-SiNWs生长的硅源。与用于常规晶须生长的众所周知的气-液-固(VLS)不同,发现a-SiNWs的生长受固-液-固机理控制,这类似于VLS模型。

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