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首页> 外文会议>Symposium on Rapid Prototyping Technologies Dec 3-5, 2002 Boston, Massachusetts, U.S.A. >Interfacial Layer Effects in Ba_(1-x)Sr_xTiO_3 Thick Films prepared by Plasma Spray
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Interfacial Layer Effects in Ba_(1-x)Sr_xTiO_3 Thick Films prepared by Plasma Spray

机译：等离子喷涂Ba_（1-x）Sr_xTiO_3厚膜的界面层效应

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摘要

The dielectric properties of high k dielectric thick films prepared by thermal spray were investigated. BaTiO_3 and Ba_(0.68)Sr_(0.32)TiO_3 thick films were deposited using plasma spray on Ag-Pd screen-printed alumina substrates. The sprayed films were predominantly polycrystalline but contained an amorphous second phase. The dielectric constants of the films decreased with decreasing film thickness in 10 ～ 60 μm range. This was attributed to the presence of an interfacial layer between the film and the substrate as determined by capacitance measurements. The capacitance density of the interfacial layer was determined to be ～ 2.7 nF/cm~2. The capacitance density of the interfacial layer increased to 12 nF/cm~2 after post heat treatment at 500℃ for 20 hours.
机译：研究了通过热喷涂制备的高k介电厚膜的介电性能。使用等离子喷涂在Ag-Pd丝网印刷的氧化铝基板上沉积BaTiO_3和Ba_（0.68）Sr_（0.32）TiO_3厚膜。喷涂的薄膜主要是多晶的，但含有非晶态的第二相。在10〜60μm范围内，薄膜的介电常数随薄膜厚度的减小而减小。这归因于通过电容测量确定的膜和基底之间的界面层的存在。界面层的电容密度确定为〜2.7 nF / cm〜2。在500℃下进行20小时的热处理后，界面层的电容密度增加到12 nF / cm〜2。

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