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Design, fabrication and characterization of MEMS deformable mirrors for ocular adaptive optics.

机译：用于眼睛自适应光学系统的MEMS变形镜的设计，制造和表征。

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摘要

This dissertation describes the design and modeling of MEMS-based bimorph deformable mirrors for adaptive optics as well as the characterization of fabricated devices. The objective of this research is to create a compact and low-cost deformable mirror that can be used as a phase corrector particularly for vision science applications.;Since this research is targeted towards the ophthalmic applications of adaptive optics, aberrations of the human eye are illustrated and the benefits of corrections by adaptive optics are explained. A couple of actuator types of the phase corrector that can be used in vision science are introduced and discussed their suitability for the purpose. The requirements to be an ideal deformable mirror for ocular adaptive optics are presented.;The characteristics of bimorph deformable mirrors originally developed for laser communications are investigated in an effort to understand their suitability for ophthalmological adaptive optics applications. A Phase shifting interferometer setup is developed for optical characterization and fundamental theory of interferogram analysis is described along with wavefront reconstruction.;The theoretical analysis of the bimorph deformable mirror begins with developing an analytical model of the laminated structure. The finite element models are also developed using COMSOL Multiphysics. Using the FEM results, the performance of deformable mirrors under various structure dimensions and operating conditions is analyzed for optimization.;A fundamental theory of adaptive optics is reviewed, paying attention to the phase corrector which is a key component of the adaptive optics system. Several types of phase corrector are presented and the minimization of their size and cost using micro electromechanical systems (MEMS) technology is also discussed.;A basic theory of piezoelectricity is explained, followed by introduction of applications to MEMS devices. The material properties of single crystal PMN-PT adopted in this research are described and characterized.;The fabrication process of the optimized deformable mirror is presented and advanced techniques used in the process are described in detail. The fabricated deformable mirrors are characterized and the comparison with FEM is described. Finally, the dissertation ends up with suggestions for further developments and tests for the mirror.
机译：本文介绍了用于自适应光学的基于MEMS的双压电晶片可变形反射镜的设计和建模以及制造设备的特性。这项研究的目的是创建一种紧凑且低成本的可变形反射镜，可以将其用作相位校正器，尤其是在视觉科学应用中;由于这项研究的目标是自适应光学的眼科应用，因此人眼的像差是图中说明了自适应光学元件进行校正的好处。介绍了可以在视觉科学中使用的相位校正器的几种执行器类型，并讨论了它们的适用性。提出了理想的用于眼睛自适应光学的可变形镜的要求。；研究了最初为激光通信而开发的双压电晶片可变形反射镜的特性，以了解其在眼科自适应光学应用中的适用性。开发了一种用于光学表征的相移干涉仪装置，并描述了干涉图分析的基本理论以及波阵面重建。;对双压电晶片可变形镜的理论分析始于开发层压结构的分析模型。有限元模型也使用COMSOL Multiphysics开发。利用有限元分析结果，分析了可变形反射镜在各种结构尺寸和工作条件下的性能，以进行优化。;回顾了自适应光学的基本理论，重点研究了相位校正器，它是自适应光学系统的关键组成部分。介绍了几种类型的相位校正器，并讨论了使用微机电系统（MEMS）技术使其尺寸和成本最小化的方法。解释了压电的基本原理，然后介绍了在MEMS器件中的应用。描述和表征了本研究中采用的单晶PMN-PT的材料性能。提出了优化的可变形反射镜的制造工艺，并详细介绍了该工艺中使用的先进技术。表征了所制造的可变形反射镜，并描述了与FEM的比较。最后，本文最后提出了进一步发展和测试镜子的建议。

著录项

  • 作者

    Park, Hyunkyu.;

  • 作者单位

    University of California, Davis.;

  • 授予单位 University of California, Davis.;
  • 学科 Engineering Electronics and Electrical.;Engineering Mechanical.;Physics Optics.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 138 p.
  • 总页数 138
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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