Non-quarter-wave double-layer antireflective(AR)coatings were designed with the aid of TFCalc thin film design software.Compared with quarter-wave double-layer AR coatings,non-quarter-wave double-layer AR coatings have a wider selection for film materials since the refractive index of the bottom-layer(n1)and upper-layer(n2)just need to satisfy the relation n1≥n2(ns/n0)1/2(nsand n0are the refractive index of substrate and air,respectively).And in the practical experiment,TiO2and SiO2sol were separately prepared by sol-gel method under acid-catalyzed condition and then consecutively deposited on K9 glass by dip-coating process to finally fabricate the mainly designed non-quarter-wave double-layer AR coating.It was found that the maximum transmittance at the reference wavelength reached 99.9%,and the measured transmittance spectrum was in accordance with the designed one from TFCalc.Futhermore,the transmittance did almost not decrease after abrasion and adhesion tests,indicating an excellent mechanical property of this SiO2/TiO2AR coating.The high transmittance and excellent mechanical property give this non-quarter-wave double-layer SiO2/TiO2AR coating a great potential in the field of solar cells.%通过TFCalc膜层设计软件设计了非λ/4-非λ/4双层增透膜体系.与λ/4-λ/4双层增透膜体系相比,非λ/4-非λ/4双层增透膜体系中内外层薄膜的折射率仅需满足n1≥n2(ns/n0)1/2(其中n1、 n2、 ns、 n0分别为内层膜、外层膜、基片和空气的折射率),即可通过调节内外层薄膜的厚度实现特定波长处的100%透过,扩展了膜层材料的选择范围.以酸催化TiO2薄膜和SiO2薄膜分别作为内、外层膜层材料,采用溶胶-凝胶浸渍-提拉法依次将TiO2溶胶和SiO2溶胶沉积在K9玻璃基片表面,最终形成SiO2/TiO2双层增透膜.实验结果表明,该双层增透膜具有与TFCalc模拟透过率曲线相吻合的实测透过率曲线,在中心波长处峰值透过率可达99.9%.该双层增透膜经耐摩擦和黏附性测试后峰值透过率基本保持不变,说明该增透膜具有良好的机械性能.这种同时具备高透过率和强机械性能的增透膜在太阳能电池等领域具有较广阔的应用前景.
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