在多结太阳电池结构中,P型锗单晶片不仅作为衬底,也是整体电池结构中的一个结。在外延生长过程中,需要进行多次异质外延生长,因此,对P型锗单晶片的表面质量提出了更高的要求。通过对P型锗片去蜡技术的研究,提高了锗片表面质量,降低了外延生长过程中雾缺陷的比例。%In the construction of multi-junction solar cells,the p-type germanium polished wafers was not only used as the substrate of the solar cells,but also used as one part of the junction.During the MOCVD process,it was grown some layers on the germanium polis
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