介绍了微弧氧化法的基本原理和工艺过程；综述了微弧氧化法制备铁电薄膜的发展历程及最新研究进展；讨论了目前微弧氧化制备铁电薄膜过程中存在的主要问题；提出了合理选择溶液体系和溶液浓度,研究工艺参数对薄膜表面形貌和铁电、介电性能的影响,提高薄膜表面质量是促进微弧氧化制备铁电薄膜技术发展的关键.%Principle and process of micro-arc oxidation are introduced; development history and the recent progress of ferroelectric films by micro-arc oxidation are reviewed. The main problems in preparing ferroelectric films by micro-arc oxidation are also discussed. Reasonably choosing solution system and concentration, considering the effects of parameters on surface morphology and ferroelectric,dielectric properties and improving the surface quality of films are presented, which are the key to the promotion of ferroelectric films by micro-arc oxidation.
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