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Design and Analysis of MEMS Based PVDF Ultrasonic Transducers for Vascular Imaging

机译：基于MEMS的PVDF超声成像传感器的设计与分析

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摘要

Polyvinilidene fluoride (PVDF) single-element transducers for high-frequency (>30 MHz) ultrasound imaging applications have been developed using MEMS (Micro-electro-Mechanical Systems) compatible techniques. Performance of these transducers has been investigated by analyzing the sources and effects of on-chip parasitic capacitances on the insertion-loss of the transducers. Modeling and experimental studies showed that on-chip parasitic capacitances degraded the performance of the transducers and an improved method of fabrication was suggested and new devices were built. New devices developed with minimal parasitic effects were shown to improve the performance significantly. A 1-mm aperture PVDF device developed with minimal parasitic effects has resulted in a reduction of insertion loss of 21 dB compared with devices fabricated using a previous method.
机译：已使用MEMS（微机电系统）兼容技术开发了用于高频（> 30 MHz）超声成像应用的聚偏氟乙烯（PVDF）单元素换能器。通过分析片上寄生电容的来源和对换能器插入损耗的影响，研究了这些换能器的性能。建模和实验研究表明，片上寄生电容降低了换能器的性能，并提出了一种改进的制造方法，并建造了新器件。已证明开发出具有最小寄生效应的新器件可以显着提高性能。与使用先前方法制造的器件相比，开发出具有最小寄生效应的1毫米孔径PVDF器件可将插入损耗降低21 dB。

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