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Microengineering Pressure Sensor Active Layers for Improved Performance

机译：微型内部化压力传感器有源层，可提高性能

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摘要

Pressure sensors play an integral role in a wide range of applications, such as soft robotics and health monitoring. In order to meet this demand, many groups microengineer the active layer-the layer that deforms under pressure and dictates changes in the output signal-of capacitive, resistive/piezoresistive, piezoelectric, and triboelectric pressure sensors in order to improve sensor performance. Geometric microengineering of the active layer has been shown to improve performance parameters such as sensitivity, dynamic range, limit of detection, and response and relaxation times. There are a wide range of implemented designs, including microdomes, micropyramids, lines or microridges, papillae, microspheres, micropores, and microcylinders, each offering different advantages for a particular application. It is important to compare the techniques by which the microengineered active layers are designed and fabricated as they may provide additional insights on compatibility and sensing range limits. To evaluate each fabrication method, it is critical to take into account the active layer uniformity, ease of fabrication, shape and size versatility and tunability, and scalability of both the device and the fabrication process. By better understanding how microengineering techniques and design compares, pressure sensors can be targetedly designed and implemented.
机译：压力传感器在广泛的应用中起作用的积分作用，例如软机器人和健康监测。为了满足这种需求，许多组微型内部器的有源层 - 在压力下变形的层，并决定了输出信号电容，电阻/压阻，压电和摩擦压力传感器的变形，以便提高传感器性能。已经显示了有源层的几何微程，已示出改善性能参数，例如灵敏度，动态范围，检测极限，以及响应和弛豫时间。有广泛的实施设计，包括微米粉，微嘧啶，线或微粒，乳头，微球，微孔和微沟槽，每个都为特定应用提供不同的优点。重要的是要比较微能活性层设计和制造的技术，因为它们可以为兼容性和感测范围限制提供额外的见解。为了评估每个制造方法，考虑有源层均匀性，易于制造，形状和尺寸的多功能性和可调性，以及装置和制造过程的可扩展性至关重要。通过更好地了解微能技术和设计如何比较，可以靶向和实现压力传感器。

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