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首页> 外文期刊>Applied Surface Science >The effect of SiO_2 buffer layer on the electrical and structural properties of Al-doped ZnO films deposited on soda lime glasses
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The effect of SiO_2 buffer layer on the electrical and structural properties of Al-doped ZnO films deposited on soda lime glasses

机译：SiO_2缓冲层对钠钙玻璃上Al掺杂ZnO薄膜电学和结构性能的影响

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摘要

In this paper, the influence of SiO_2 buffer layer on electrical and structural properties of AZO films on soda lime glasses has been investigated. The results showed that the Hall mobility and carrier concentration of AZO films deposited on soda lime glasses at high temperature could be enhanced by introducing SiO_2 layers. The optical absorption edges of AZO films with SiO_2 buffer layer are blue shifted compared with that of buffer layer free due to the increase of carrier concentration. SiO_2 layers prepared at 400 ° C more effectively suppress the diffusion of Na atoms into AZO films compared with that prepared at room temperature. On the other hand, the in-plane stress dependence of optical band gap is linear for AZO films deposited on quartz glass substrates, but is deviated from linearity in the case of soda lime glass substrates.
机译：本文研究了SiO_2缓冲层对钠钙玻璃上AZO薄膜电学和结构性能的影响。结果表明，通过引入SiO_2层可以提高钠钙玻璃在高温下沉积的AZO薄膜的霍尔迁移率和载流子浓度。由于载流子浓度的增加，具有SiO_2缓冲层的AZO膜的光吸收边缘与没有缓冲层的AZO膜的光吸收边缘发生蓝移。与在室温下制备的SiO_2层相比，在室温下制备的SiO_2层更有效地抑制了Na原子向AZO膜的扩散。另一方面，光学带隙的面内应力依赖性对于沉积在石英玻璃基板上的AZO膜是线性的，但是在钠钙玻璃基板的情况下偏离线性。

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  • 来源
    《Applied Surface Science》 |2011年第13期|p.5471-5475|共5页
  • 作者

    K.H. Ri; Y.B. Wang; W.L Zhou; J.X. Gao; XJ. Wang; J. Yu;

  • 作者单位

    Department of Electric Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;

    Department of Electric Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;

    Department of Electric Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;

    Department of Electric Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;

    Department of Electric Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;

    Department of Electric Science and Technology,Huazhong University of Science and Technology, No. 1037, Luoyu Road, Hongshan District, Wuhan 430074, China;

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  • 正文语种 eng
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  • 关键词

    al doped zinc oxide; transparent conducting film; sputtering; soda lime glass; buffer layer;

    机译：铝掺杂氧化锌;透明导电膜;溅射;钠钙玻璃​​;缓冲层;

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