Electrical conditioning of diamond-like carbon films for the formation of coated field emission cathodes

M. Semenenko; G. Okrepka; Yilmazoglu; H.L. Hartnagel; D. Pavlidis

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Electrical conditioning of diamond-like carbon films for the formation of coated field emission cathodes

机译：类金刚石碳膜的电调节，用于形成涂覆的场发射阴极

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Diamond-like carbon (DLC) films deposited on different substrates by plasma enhanced chemical vapour deposition were investigated. Bonding states and film quality were characterized by FT-IR spectroscopy. The influence of the power of plasma and the deposition time on the sp~2/sp~3 ratio as well as the concentration of CH_n bonds was studied. The influence of sp~2/sp~3 ratio on the formation process of conducting channels in diamond-like carbon films as a result of electrical breakdown was determined. Reproducible increase of diamond-like carbon film conductivity, with initial sp~2 /sp~3 ratio larger than 0.16, was observed after electrical breakdown.

机译：研究了通过等离子体增强化学气相沉积法在不同基底上沉积的类金刚石碳（DLC）膜。通过FT-IR光谱表征键合状态和膜质量。研究了等离子体功率和沉积时间对sp〜2 / sp〜3比以及CH_n键浓度的影响。确定了sp〜2 / sp〜3比值对电击穿结果对类金刚石碳膜导电通道形成过程的影响。电击穿后，观察到可再现的类金刚石碳膜电导率增加，初始sp〜2/2 / sp〜3比值大于0.16。

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来源
《Applied Surface Science》 |2010年第2期|p.388-392|共5页
作者
M. Semenenko; G. Okrepka; Yilmazoglu; H.L. Hartnagel; D. Pavlidis;
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作者单位

V.Ye. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine. 45, pr. Nauki, 03028 Kyiv, Ukraine;

V.Ye. Lashkaryov Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine. 45, pr. Nauki, 03028 Kyiv, Ukraine;

Department of High Frequency Electronics, Technische Universiteat Darmstadt, 64283, Darmstadt, Germany;

Department of High Frequency Electronics, Technische Universiteat Darmstadt, 64283, Darmstadt, Germany;

Department of High Frequency Electronics, Technische Universiteat Darmstadt, 64283, Darmstadt, Germany;

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正文语种 eng
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关键词
diamond-like carbon films; absorption spectra; electrical conditioning;

机译：类金刚石碳膜;吸收光谱电气调节;

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2. Local Adhesion of Diamond-Like Carbon Films Coated on Substrates in a Trench-shaped Cathode [J] . Masami OHNISHI, Hiroshi NOZAKI, Hodaka OSAWA, 真空 . 2007,第5期

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3. Long-term stability of a horizontally-aligned carbon nanotube field emission cathode coated with a metallic glass thin film [J] . Bohr-Ran Huang, Tzu-Ching Lin, Jinn P. Chu Carbon: An International Journal Sponsored by the American Carbon Society . 2012,第4期

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5. Growth and characterization of diamond-like carbon and diamond films: Effect of atomic hydrogen beams and studies of field emission of electrons. [D] . Stavrides, Alexander P. 2000

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Electrical conditioning of diamond-like carbon films for the formation of coated field emission cathodes

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