• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied Surface Science >Diamond-like carbon films deposited by a hybrid ECRCVD system
【24h】

Diamond-like carbon films deposited by a hybrid ECRCVD system

机译：通过混合ECRCVD系统沉积的类金刚石碳膜

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A novel hybrid technique for diamond-like carbon (DLC) film deposition has been developed. This technique combines the electron cyclotron resonance chemical vapor deposition (ECRCVD) of C_2H_2 and metallic magnetron sputtering. Here we described how DLC film is used for a variety of applications such as stamper, PCB micro-tools, and threading form-tools by taking advantage of hybrid ECRCVD system. The structure of the DLC films is delineated by a function of bias voltages by Raman spectroscopy. This function includes parameters such as dependence of G peak positions and the intensity ratio (I_D/I_G). Atomic force microscope (AFM) examines the root-mean-square (R.M.S.) roughness and the surface morphology. Excellent adhesion and lower friction coefficients of a DLC film were also assessed.
机译：已开发出一种用于类金刚石碳（DLC）膜沉积的新型混合技术。该技术结合了C_2H_2的电子回旋共振化学气相沉积（ECRCVD）和金属磁控溅射。在这里，我们介绍了如何利用混合ECRCVD系统将DLC膜用于各种应用，例如压模，PCB微型工具和螺纹成型工具。 DLC膜的结构通过拉曼光谱法通过偏置电压的函数来描绘。该函数包括诸如G峰位置和强度比（I_D / I_G）的依赖性之类的参数。原子力显微镜（AFM）检查均方根（R.M.S.）粗糙度和表面形态。还评估了DLC膜的优异附着力和较低的摩擦系数。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号