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New results in pulsed laser deposition of poly-methyl-methacrylate thin films

机译:脉冲激光沉积聚甲基丙烯酸甲酯薄膜的新结果

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摘要

Thin organic films based on poly-methyl-methacrylate (PMMA) polymer have been obtained by pulsed laser deposition (PLD) on silicon substrates. The films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and Raman spectroscopy (RS). We observed that the film composition and structure depend on the laser fluence and on the temperature of the substrate during deposition.
机译:通过在硅基板上进行脉冲激光沉积(PLD),已经获得了基于聚甲基丙烯酸甲酯(PMMA)聚合物的有机薄膜。通过X射线衍射(XRD),X射线光电子能谱(XPS),原子力显微镜(AFM)和拉曼光谱(RS)来表征膜。我们观察到,膜的成分和结构取决于激光通量和沉积过程中基材的温度。

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