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Testing ultra fine pitch wirebonds

机译:测试超细间距引线键合

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Although the pitch between bonds reduces year on year, the challenges of meeting this demand has fallen on other processes more than the science of bond testing. With industrial bonding at 50μm becoming common place, this is no longer the case. Wire bonding at 25/μm and below is proven in laboratories, including the shear and pull testing of these wires. Although it is possible to use existing testers at these geometries, their ease of use and accuracy is being pushed to, if not beyond, their limits. In order to accurately test and measure these finer pitches, equipment manufacturers have to address a series of issues such as: 1. Lower ranges of force measurement, 0 to 25grams force with no proportionate loss of accuracy 2. Improved optics and illumination to enable easy alignment of the tool to the sample and grading of the failure mode 3. New tool designs optimised for the changing shape of ultra fine pitch bonds and the relative increase in thickness of the passivation layer 4. Improved step back accuracy when shear testing 5. Anti-vibration measures to maintain accuracy and optical performance with typical environmental conditions 6. Improved control and accuracy of the sample and tool manipulation.
机译:尽管债券之间的间距逐年减少,但满足此需求的挑战比债券测试的科学更多地落在其他流程上。随着在50μm的工业粘合变得很普遍,情况不再如此。 25 /μm及以下的导线键合在实验室中得到了证明,包括对这些导线的剪切和拉力测试。尽管可以在这些几何形状上使用现有的测试仪,但它们的易用性和准确性甚至会超出其极限。为了准确地测试和测量这些较小的螺距,设备制造商必须解决一系列问题,例如:1.较小的测力范围,0至25克的测力,而不会成比例地损失精度2.改进的光学和照明功能使操作简便将工具对准样品并确定破坏模式的等级3.针对超细间距键合的形状变化和钝化层厚度相对增加而优化的新工具设计4.进行剪切测试时提高了后退精度5.抗-振动措施,可在典型的环境条件下保持精度和光学性能。6.改进了对样品和工具操作的控制和准确性。

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