Investigation of a Hot Filament Diamond Deposition by in situ Infrared Absorption

Cui Jingbiao; Ma Yurong; Fang Rongchuan

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Investigation of a Hot Filament Diamond Deposition by in situ Infrared Absorption

机译：原位红外吸收法研究热丝金刚石沉积

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In situ infrared absorption spectroscopy has been measured for a hot filament diamond growth process. Absorption of CH_4 and C_2H_2 species at 3050 cm~(-1) and 730 cm~(-1) were detected respectively. The absorption intensity of CH_4 decreases while that of C_2H_2 increases as filament temperature is raised. The correlation between infrared absorption intensity and diamond growth rate or diamond film quality was found. High C_2H_2 or low CH_4 concentration in the reaction region leads to high quality diamond film growth and high growth rate.

机译：已经针对热丝金刚石生长过程测量了原位红外吸收光谱。分别测定了CH_4和C_2H_2在3050 cm〜（-1）和730 cm〜（-1）处的吸收。随着灯丝温度的升高，CH_4的吸收强度降低，而C_2H_2的吸收强度升高。发现红外吸收强度与金刚石生长速率或金刚石膜质量之间的相关性。反应区域中的高C_2H_2或低CH_4浓度导致高质量的金刚石膜生长和高的生长速率。

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来源
《High Technology Letters》 |1996年第1期|p.72-76|共5页
作者
Cui Jingbiao; Ma Yurong; Fang Rongchuan;
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作者单位

Department of Physics, University of Science and Technology of China, Hefei 230026, P.R.China;

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原文格式 PDF
正文语种 eng
中图分类工业技术;自然科学总论;
关键词
hot filament CVD; in situ infrared absorption; diamond quality; growth rate;

机译：热丝CVD;原位红外吸收;金刚石质量;生长速率;

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专利

1. Investigation of a Hot Filament Diamond Deposition by in situ Infrared Absorption [J] . 崔景彪高技术通讯：英文版 . 1996,第001期

机译：原位红外吸收对热灯丝金刚石沉积的研究
2. Growth of in situ multilayer diamond films by varying substrate-filament distance in hot-filament chemical vapor deposition [J] . Mubarak Ali, Mustafa UErgen Journal of Materials Research . 2012,第24期

机译：在热丝化学气相沉积中通过改变基体丝距来生长原位多层金刚石膜
3. Gas-phase characterization in diamond hot-filament CVD by infrared tunable diode laser absorption spectroscopy [J] . Hirmke J, Hempel F, Stancu GD, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2006,第9期

机译：红外可调二极管激光吸收光谱法表征金刚石热丝CVD中的气相
4. Use of resonance-enhanced multiphoton ionization (REMPI) for probing hydrogen atoms in diamond chemical vapor deposition using a hot filament reactor [C] . Stephen A. Redman, Stephen R. Langford, Keith N. Rosser, Conference on lasers in synthesis, characterization,and processing of diamond . 1998

机译：使用热丝反应器使用共振增强的多相电离（REMPI）用于探测金刚石化学气相沉积中的氢原子
5. Investigation of Hot Filament Chemical Vapor Deposition (HFCVD) of Heavily Boron Doped Superconductive Diamond for Device Applications. [D] . Green, Delroy Earl. 2017

机译：重硼掺杂超导金刚石在设备应用中的热丝化学气相沉积（HFCVD）研究。
6. Unusual Dependence of the Diamond Growth Rate on the Methane Concentration in the Hot Filament Chemical Vapor Deposition Process [O] . Byeong-Kwan Song, Hwan-Young Kim, Kun-Su Kim, 2021

机译：金刚石生长速率对热长丝化学气相沉积过程中甲烷浓度的不寻常依赖性
7. The carbon absorption of tungsten filament during diamond deposition treatment in hot-filament method. [O] . Hisashi Suzuki, Hideaki Matsubara, Noritoshi Horie 1986

机译：热丝法中金刚石沉积处理过程中钨丝的碳吸收。
8. Effects of Multiple Filament Geometry in the Hot Filament Deposition of Diamond Films. [R] . Farabaugh, E. N., Feldman, A., Robins, L. H. 1991

机译：多丝几何在金刚石薄膜热丝沉积中的作用。

Investigation of a Hot Filament Diamond Deposition by in situ Infrared Absorption

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