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首页> 外文期刊>IEEE Transactions on Magnetics >Nanostructures of Sm-Co on Cr thin films
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Nanostructures of Sm-Co on Cr thin films

机译:Cr薄膜上Sm-Co的纳米结构

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The nanostructures of Sm-Co on Cr thin films prepared by dc magnetron sputtering were investigated by high resolution transmission electron microscopy (HRTEM) and diffraction techniques. HRTEM micrographs show that the crystallites in the Sm-Co films, as revealed by the lattice fringes, are distributed discontinuously in the matrix. The matrix is amorphous as indicated by the microdiffraction study. The size of the crystallites is in the range of 2/spl sim/5 nanometers. The volume fraction of the crystallites in the film decreases from 91% to 54% as the argon pressure is increased from 5 mTorr to 30 mTorr. Micrographs recorded in a bright field transmission electron microscope (TEM) with a defocus of a few micrometers reveal grain-like structures of about 25 nm in some but not all films. This grain-structure is found to be inherited from the Cr underlayer.
机译:通过高分辨率透射电子显微镜(HRTEM)和衍射技术研究了直流磁控溅射制备的Cr薄膜上Sm-Co的纳米结构。 HRTEM显微照片显示,Sm-Co膜中的微晶(如晶格条纹所示)不连续地分布在基体中。如微衍射研究所示,基质是无定形的。微晶的尺寸在2 / spl sim / 5纳米的范围内。随着氩气压力从5 mTorr增加到30 mTorr,薄膜中微晶的体积分数从91%降低到54%。用几微米的散焦在明场透射电子显微镜(TEM)中记录的显微照片揭示了一些但不是全部膜中约25 nm的颗粒状结构。发现该晶粒结构是从Cr底层继承的。

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