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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >Influence of surface conductivity on sensitivity of acoustic wave gas sensors based on multilayered structures
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Influence of surface conductivity on sensitivity of acoustic wave gas sensors based on multilayered structures

机译：表面电导率对基于多层结构的声波气体传感器灵敏度的影响

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摘要

The influences of the surface conductivity on the velocity of an acoustic wave (AW) in a multilayered material are studied theoretically with the transfer matrix method and the conductivity sensitivity of the AW sensor is presented. It is found that the velocity of the AW increases with decreasing surface conductivity and vice versa. The result is used to explain the abnormal response of AW sensors, in which the central frequencies of AW sensors increase after they sorb the detected gases. Meanwhile, the conductivity sensitivity is found to be related to the dielectric constants of the multilayered material and the electromechanical coupling coefficient of the sensor. Finally, the sensitivities of AW sensors based on multilayered structures are optimized by considering the influences of the surface conductivities of the sensors with different initial conductivities and thicknesses of the sensitive layers.
机译：用转移矩阵法理论研究了表面电导率对多层材料中声波（AW）速度的影响，并给出了AW传感器的电导率灵敏度。发现AW的速度随着表面电导率的降低而增加，反之亦然。该结果用于解释AW传感器的异常响应，其中AW传感器吸收检测到的气体后其中心频率会增加。同时，发现电导率灵敏度与多层材料的介电常数和传感器的机电耦合系数有关。最后，通过考虑具有不同初始电导率和敏感层厚度的传感器的表面电导率的影响，优化了基于多层结构的AW传感器的灵敏度。

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