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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators
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Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators

机译：固体压电薄膜谐振器横向传播的厚度扩展波的分析

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摘要

In a solidly mounted piezoelectric thin film resonator (SMR), acoustic waves propagate not only in the thickness direction but also in the lateral direction. In this study, we analyzed the acoustic wave in the SMR-type piezoelectric thin film resonator and derived the dispersion relation between the lateral wave number and frequency, considering wave propagation in the lateral direction. The lateral wave number was shown to be a complex number due to the leak of the acoustic energy to a substrate. It also was shown that the Q factor could be calculated from the complex cutoff frequency, and it becomes higher when the number of quarter-wave (/spl lambda//4) layers increases. Using the dispersion relation, the trapped-energy resonant modes of an SMR were analyzed, considering the boundary conditions at the edge of the electrode.
机译：在固体安装的压电薄膜谐振器（SMR）中，声波不仅在厚度方向上而且还在横向上传播。在这项研究中，我们分析了SMR型压电薄膜谐振器中的声波，并考虑了在横向方向上的波传播，得出了横向波数与频率之间的色散关系。由于声能泄漏到基片，侧波数显示为复数。还表明，可以从复数截止频率计算出Q因子，当四分之一波（/ spl lambda // 4）的层数增加时，Q因子会更高。利用色散关系，考虑了电极边缘的边界条件，分析了SMR的俘获能量共振模式。

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