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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Estimation of the squeeze film effect in a surface acoustic wave motor
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Estimation of the squeeze film effect in a surface acoustic wave motor

机译：声表面波电动机中的挤压膜效应估计

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摘要

This paper describes the air film characteristic in the interface between the slider and stator substrate of a surface acoustic wave (SAW) motor, and the difference of the squeeze film effect by the form of the slider. Because the vibration amplitude of the SAW motor is several 10 nm order, analysis of pressure was performed by using the molecular gas-film lubrication (MGL) equation. In the analysis, the MGL equation was split into advection phase and nonadvection phase, and calculation of advection and nonadvection phases was performed by using the cubic interpolated propagation (CIP) method and the finite difference method, respectively. From analysis results it was found that the time to steady pressure of air film depends on the radius of projection arranged on the contact surface of the slider. Also found was that the steady pressure in the interface does not depend on the radius arid height of the projection, but it depends on the minimum spacing between the slider and the stator substrate.
机译：本文描述了声表面波（SAW）电动机的滑块与定子基板之间的界面中的气膜特性，以及滑块形式对挤压膜效应的影响。由于SAW电动机的振动幅度约为10 nm数量级，因此使用分子气膜润滑（MGL）方程进行了压力分析。在分析中，将MGL方程分为对流阶段和非对流阶段，分别使用三次插值传播（CIP）方法和有限差分法进行对流和非对流阶段的计算。从分析结果中发现，气膜达到稳定压力的时间取决于布置在滑块接触表面上的凸起的半径。还发现接口中的稳定压力不取决于突起的半径和高度，而是取决于滑块和定子基板之间的最小间距。

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