An ultra-precision XY&thetas;Z piezo-micropositioner. I.Design and analysis

Shuo Hung Chang; Chung Kai Tseng; Hon Chan Chien

首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >An ultra-precision XY&thetas;Z piezo-micropositioner. I.Design and analysis

【24h】

An ultra-precision XY&thetas;Z piezo-micropositioner. I.Design and analysis

机译：超精密XYθZ压电微型定位器。一，设计与分析

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

A novel three degree-of-freedom micropositioner was developed forndeep ultraviolet lithography applications. The design of thenmicropositioner utilizes the monolithic flexural mechanism with built-innmultilayer piezoelectric actuators and sensors to achieve translationsnin the X- and Y-axes and rotation in the ΘZ-axis. Thencompact design aims at high resolution, high stiffness, and extremelynlow crosstalk interference. Parametric analyses of harmonic and forcednvibrations are conducted to solve the derived dynamic models for thennear optimum geometry of the micropositioner. Furthermore, the errornbudget analysis is conducted to minimize the effects of the geometricntolerance, material variation, and hysteresis errors

机译：一种新型的三自由度微型定位器被开发用于深紫外光刻应用。微型定位器的设计利用内置的多层压电致动器和传感器的整体挠曲机构来实现X轴和Y轴的平移以及ΘZ轴的旋转。紧凑的设计旨在实现高分辨率，高刚度和极低的串扰干扰。进行了谐波和强迫振动的参数分析，以解决微定位器近乎最佳几何形状的动力学模型。此外，进行误差预算分析以最小化几何公差，材料变化和磁滞误差的影响

著录项

来源
《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 |1999年第4期|p.897-905|共9页
作者
Shuo Hung Chang; Chung Kai Tseng; Hon Chan Chien;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类声学工程;计量学;
关键词
microactuators; micropositioning; piezoelectric actuators; ultraviolet lithography; vibrations; built-in multilayer piezoelectric actuators; crosstalk interference; deep ultraviolet lithography applications; dynamic models; error budget analysis; forced vibrations;

机译：微致动器;微定位;压电致动器;紫外光刻;振动;内置多层压电致动器;串扰;深紫外光刻应用;动力学模型;误差预算分析;强迫振动;

相似文献

外文文献
中文文献
专利

1. An ultra-precision XY/spl theta//sub Z/ piezo-micropositioner. I. Design and analysis [J] . Shuo Hung Chang, Chung Kai Tseng IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 1999,第4期

机译：超精密XY / spl theta // sub Z /压电微型定位器。一，设计与分析
2. An ultra-precision XYΘZ piezo-micropositioner. II.Experiment and performance [J] . Shuo Hung Chang, Chung Kai Tseng, Hon Chan Chien IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 1999,第4期

机译：超精密XYθZ压电微型定位器。二，实验与表现
3. An ultra-precision XY/spl Theta//sub Z/ piezo-micropositioner. II. Experiment and performance [J] . Shuo Hung Chang, Chung Kai Tseng IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 1999,第4期

机译：超精密XY / spl Theta // sub Z /压电微型定位器。二。实验与表现
4. Optimization Analysis Of Ultra-Precision Flying-Tool Cutting Machine For Optical Elements [C] . Shenggen Zhu, Feihu Zhang, Jinfeng Bai, International Conference on Photonics and Optical Engineering . 2020

机译：用于光学元件超精密飞行工具切割机的优化分析
5. Generalized Form Characterization of Ultra-precision Freeform Surfaces Using an Invariant Feature-based Pattern Analysis. [D] . Mingjun, Ren. 2012

机译：使用基于特征的不变特征分析对超精密自由曲面的广义形式表征。
6. Research on Deterministic Figuring of Ultra-Precision Shaft Parts Based on Analysis and Control of Figuring Ability [O] . Zizhou Sun, Yifan Dai, Hao Hu, 2020

机译：基于成形能力分析与控制的超精密轴零件确定性成形研究
7. On-machine Measurement and Uncertainty Analysis for Semicircular Narrow Neck Thickness based on Ultra-precision Machine Tool [O] . Xin Jin, Ruilin Gao, Chaojiang Li, 2021

机译：基于超精密机床的半圆窄颈部厚度的机床测量和不确定性分析

An ultra-precision XY&thetas;Z piezo-micropositioner. I.Design and analysis

摘要

著录项

相似文献

相关主题

期刊订阅