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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory
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Numerical analysis of thickness shear thin film piezoelectric resonators using a laminated plate theory

机译：厚度剪切薄膜压电谐振器的层板理论数值分析

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摘要

Finite element matrix equations are derived from a two-dimensional, piezoelectric high frequency laminated plate theory. Two-layer ZnO/Si and three-layer ZnO/SiO/sub 2//Si thin film resonators vibrating at the fundamental thickness shear mode are investigated using the finite element models. Straight crested waves propagating in a resonator are studied. Resonant frequency, mode shapes and electromechanical coupling coefficient of the fundamental thickness shear mode are calculated and presented with respect to the C-axis orientation of the ZnO layer, and thickness ratios of the layers in a resonator. The results from the laminated plate model are checked against the three dimensional finite element solution and found to be accurate for the fundamental thickness shear and its anharmonic overtones. The plate model does not yield as accurate a frequency spectrum for flexure, face shear and extensional modes.
机译：有限元矩阵方程式是从二维压电高频叠层板理论推导出来的。使用有限元模型研究了在基本厚度剪切模式下振动的两层ZnO / Si和三层ZnO / SiO / sub 2 // Si薄膜谐振器。研究了在谐振器中传播的直波峰。计算并给出了基本厚度剪切模式的共振频率，模式形状和机电耦合系数，并与ZnO层的C轴方向以及共振器中各层的厚度比有关。叠层板模型的结果针对三维有限元解进行了检查，发现对于基本厚度剪切及其非谐泛音是准确的。平板模型对于弯曲，表面剪切和拉伸模式无法产生准确的频谱。

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