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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Numerical analysis of thickness shear thin film piezoelectricresonators using a laminated plate theory
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Numerical analysis of thickness shear thin film piezoelectricresonators using a laminated plate theory

机译：厚度剪切薄膜压电谐振器的层板理论数值分析

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摘要

Finite element matrix equations are derived from antwo-dimensional, piezoelectric high frequency laminated plate theory.nTwo-layer ZnO/Si and three-layer ZnO/SiO2/Si thin filmnresonators vibrating at the fundamental thickness shear mode areninvestigated using the finite element models. Straight crested wavesnpropagating in a resonator are studied. Resonant frequency, mode shapesnand electromechanical coupling coefficient of the fundamental thicknessnshear mode are calculated and presented with respect to the C-axisnorientation of the ZnO layer, and thickness ratios of the layers in anresonator. The results from the laminated plate model are checkednagainst the three dimensional finite element solution and found to benaccurate for the fundamental thickness shear and its anharmonicnovertones. The plate model does not yield as accurate a frequencynspectrum for flexure, face shear and extensional modes
机译：从二维压电高频叠层板理论推导了有限元矩阵方程。使用有限元模型研究了在基本厚度剪切模式下振动的两层ZnO / Si和三层ZnO / SiO2 / Si薄膜谐振器。研究了在谐振器中传播的直峰波。计算并给出了基本厚度剪切模式的共振频率，模式形状和机电耦合系数，并给出了关于ZnO层的C轴取向以及谐振器中各层的厚度比。对叠层板模型的结果进行了三维有限元解的检验，发现对于基本厚度剪切及其非调和泛音是正确的。平板模型对于弯曲，端面剪切和拉伸模式无法产生准确的频率频谱

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