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首页> 外文期刊>Japanese journal of applied physics >Fabrication of a GaN template with an air tunnel in a patterned sapphire substrate using carbonization with a photoresist mask
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Fabrication of a GaN template with an air tunnel in a patterned sapphire substrate using carbonization with a photoresist mask

机译：使用用光致抗蚀剂掩模的碳化在图案化的蓝宝石衬底中用空气隧道制造GaN模板的GaN模板

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摘要

We successfully fabricated a template with an air tunnel between a patterned sapphire substrate (PSS) and GaN using a photoresist mask. The photoresist mask was subjected to plasma etching to induce the growth of the GaN nucleus at the top of the mask by exposing only the top of the PSS lens to the mask height. The carbon profile of the photoresist mask was checked by secondary ion mass spectrometry to detect the presence or absence of carbon in the GaN template during the process. In order to confirm the carbon's effect on the epitaxially grown GaN template, the XRD was confirmed by the pole figure and the rocking curve. In order to confirm the change of the energy level of GaN by forming a trap in the energy band by carbon, we confirmed the effect of the carbon by comparing the degree of pure GaN.
机译：我们在图案化的蓝宝石衬底（PSS）和GaN之间成功地制造了一种带有空气隧道的模板，使用光致抗蚀剂掩模。对光致抗蚀剂掩模进行等离子体蚀刻，以通过仅将PSS透镜的顶部暴露于掩模高度而诱导掩模顶部的GaN核的生长。通过二次离子质谱法检查光致抗蚀剂掩模的碳曲线，以检测该过程中GaN模板中的碳的存在或不存在。为了确认碳对外延生长的GaN模板的影响，通过极值和摇摆曲线确认XRD。为了通过碳在能量带中形成陷阱来确认GaN的能量水平的变化，我们通过比较纯GaN的程度来确认碳的影响。

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  • 来源
    《Japanese journal of applied physics》 |2020年第1期|015501.1-015501.6|共6页
  • 作者

    Seunghee Cho; Woo Seop Jeong; Doo Won Lee; Min Joo Ahn; Kyu-Yeon Shim; Dongjin Byun;

  • 作者单位

    Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea;

    Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea;

    Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea;

    Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea;

    Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea;

    Department of Materials Science and Engineering Korea University Seoul 02841 Republic of Korea;

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