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Nanoscale ultrasonic subsurface imaging with atomic force microscopy

机译:具有原子力显微镜的纳米级超声地下成像

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摘要

Imaging of subsurface features down to the nanometer scale is of great importance in various fields such as microelectronics, materials science, nanobiology, and nanomedicine. Since their invention 25 years ago, ultrasonic-based atomic force microscopy (AFM) techniques have attracted vast attention for their mechanical surface and subsurface sensing capability. In this Perspective article, we review the research on ultrasonic AFMs for subsurface imaging. We first describe the instrumentation setups and different detection schemes of ultrasonic AFMs. Then, attention is paid to the studies of the physical contrast mechanism, the evaluation of the detection capabilities, in particular, the detection depth limits, and the optimization approaches to enhance the contrast and to improve the detection depth. After that we present typical applications of using ultrasonic AFMs for detecting subsurface defects including dislocations, voids, and interfaces in functional materials and devices; visualizing embedded inclusions in composites; and imaging subcellular structures in biological materials. We conclude with an outlook of the challenges faced by ultrasonic AFMs toward fast, high resolution, and quantitative subsurface imaging.
机译:在微电子,材料科学,纳米生物学和纳米医生等各个领域,纳米尺度的地下特征的成像非常重要。由于他们的发明25年前,超声波的原子力显微镜(AFM)技术引起了对其机械表面和地下传感能力的广大关注。在这个透视文章中,我们审查了对地下成像的超声波AFMS的研究。我们首先描述了超声波AFMS的仪表设置和不同的检测方案。然后,注意对物理对比机制的研究,检测能力的评估,特别是检测深度限制以及优化方法来提高对比度并改善检测深度。之后,我们呈现使用超声波AFM以检测包括功能材料和装置中的脱位,空隙和界面的地下缺陷的典型应用;在复合材料中可视化嵌入式夹杂物;生物材料中的成像亚细胞结构。我们的结论是,超声波AFMS朝向快速,高分辨率和定量地下成像所面临的挑战的展望。

著录项

  • 来源
    《Journal of Applied Physics》 |2020年第18期|180901.1-180901.13|共13页
  • 作者

    Chengfu Ma; Walter Arnold;

  • 作者单位

    CAS Key Laboratory of Mechanical Behavior and Design of Materials Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei 230026 China;

    Department of Materials Science and Engineering Saarland University D-66123 Saarbruecken Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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