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首页> 外文期刊>Journal of Crystal Growth >Dependence of the InAs size distribution on the stacked layer number for vertically stacked InAs/GaAs quantum dots
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Dependence of the InAs size distribution on the stacked layer number for vertically stacked InAs/GaAs quantum dots

机译:InAs尺寸分布对垂直堆叠的InAs / GaAs量子点的堆叠层数的依赖性

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摘要

Atomic force microscopy (AFM), transmission electron microscopy (TEM), and photoluminescence measurements were carried out to investigate the dependence of the InAs quantum dot size distribution on the stacked layer number for vertically stacked InAs/GaAs quantum dots (QDs) grown on (001) GaAs substrates. AFM and TEM images showed that the size of the QDs increased with increase in the stacked layer number up to the deposition time of 20s. However, the size distribution uniformity of the QDs was improved with increase in the stacked layer number when the Deposition time and the stacking layer of the InAs QDs gradually decreased. These results can help in an improved Understanding of the control of sizes of QDs in InAs/GaAs QD arrays.
机译:进行了原子力显微镜(AFM),透射电子显微镜(TEM)和光致发光测量,以研究InAs量子点尺寸分布对在(a)上垂直生长的InAs / GaAs量子点(QD)的堆叠层数的依赖性。 001)GaAs衬底。 AFM和TEM图像显示,随着沉积层数的增加,QD的尺寸增加,直至20s的沉积时间。然而,当InAs QD的沉积时间和堆叠层逐渐减少时,随着堆叠层数的增加,QD的尺寸分布均匀性得到改善。这些结果可以帮助您更好地了解InAs / GaAs QD阵列中QD尺寸的控制。

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