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Quality evaluation of multi-crystalline silicon ingots produced in a directional solidification furnace with different theories

机译:不同理论的定向凝固炉生产的多晶硅锭的质量评估

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摘要

Three methods for evaluating the quality of silicon ingots produced in a directional solidification furnace were compared. The methods are based on the thermo-elastic theory, thermo-plastic theory and thermo-creep theory. The methods use the von Mises stress, the accumulated viscoplastic strain, and the dislocation density as the evaluation parameters of ingot quality, respectively. The evaluation parameters and their distributions were calculated in the growing silicon ingots during the solidification process and in the grown ingots during the annealing process. The distributions of the quality evaluation parameters in the growing ingots are similar in the solidification process for the three methods. The evaluation method based on thermo-elastic theory is recommended because of its higher computational efficiency than the other two methods. However, in the ingot annealing process the distributions of the evaluation parameters vary considerably with the three methods. The thermo-plastic theory and the thermo-creep theory are more suitable for the whole process. It demonstrates that large dislocation density is generated in the ingot during the annealing process.
机译:比较了三种评估定向凝固炉生产的硅锭质量的方法。这些方法基于热弹性理论,热塑性理论和热蠕变理论。该方法分别使用冯·米塞斯应力,累积的粘塑性应变和位错密度作为铸锭质量的评估参数。在凝固过程中,在生长的硅锭中以及在退火过程中,在生长的硅锭中计算评估参数及其分布。三种方法的凝固过程中,生长锭中质量评估参数的分布相似。推荐使用基于热弹性理论的评估方法,因为它比其他两种方法具有更高的计算效率。但是,在铸锭退火过程中,三种方法的评估参数分布差异很大。热塑性理论和热蠕变理论更适合整个过程。这表明在退火过程中在晶锭中产生大的位错密度。

著录项

  • 来源
    《Journal of Crystal Growth》 |2014年第1期|296-301|共6页
  • 作者单位

    Key Laboratory of Thermo-Fluid Science and Engineering, Ministry of Education, School of Energy and Power Engineering, Xi'an Jiaotong University Xi'an, Shaanxi 710049, China;

    Key Laboratory of Thermo-Fluid Science and Engineering, Ministry of Education, School of Energy and Power Engineering, Xi'an Jiaotong University Xi'an, Shaanxi 710049, China;

    Key Laboratory of Thermo-Fluid Science and Engineering, Ministry of Education, School of Energy and Power Engineering, Xi'an Jiaotong University Xi'an, Shaanxi 710049, China,Beijing Electro-Mechanical Engineering Institute, Beijing 100074, China;

    Key Laboratory of Thermo-Fluid Science and Engineering, Ministry of Education, School of Energy and Power Engineering, Xi'an Jiaotong University Xi'an, Shaanxi 710049, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Computer simulation; A1. Stresses; A1. Dislocation density; A1. Defects; A1. Directional solidification;

    机译:A1。计算机仿真;A1。压力;A1。位错密度;A1。缺陷;A1。定向凝固;

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