...
首页> 外文期刊>Journal of Crystal Growth >GaN based LEDs with semipolar QWs employing embedded sub-micrometer sized selectively grown 3D structures
【24h】

GaN based LEDs with semipolar QWs employing embedded sub-micrometer sized selectively grown 3D structures

机译:具有半极性QW的GaN基LED,采用嵌入式亚微米尺寸的选择性生长3D结构

获取原文
获取原文并翻译 | 示例
           

摘要

We present LED structures with embedded semipolar {1011} quantum wells based on 2-inch c-plane GaN templates grown on c-plane sapphire substrates. Using selective area epitaxy, we achieved periodic GaN stripe structures with triangular cross-section with dimensions of a few 100 nm on continuous areas of several cm2. These structures exhibit semipolar side facets on which GalnN quantum wells with reduced piezoelectric fields have been deposited. The small dimensions of these structures allow complete embedding by GaN cladding layers eventually resulting in a flat c-plane surface. Consequently, our approach allows conventional device processing to be applied. Structural, optical, and electrical characterization is presented and the influence of mask material and pattern on the performances of LED structures is investigated.
机译:我们介绍了基于在c平面蓝宝石衬底上生长的2英寸c平面GaN模板的嵌入式半极性{1011}量子阱的LED结构。使用选择性区域外延,我们在几平方厘米的连续区域上获得了具有三角形横截面,尺寸为几百纳米的周期性GaN条纹结构。这些结构具有半极性侧面,在其上已沉积了压电场减小的GalnN量子阱。这些结构的小尺寸允许通过GaN覆层完全嵌入,最终形成平坦的c平面表面。因此,我们的方法允许应用常规设备处理。介绍了结构,光学和电气特性,并研究了掩模材料和图案对LED结构性能的影响。

著录项

  • 来源
    《Journal of Crystal Growth》 |2013年第1期|101-104|共4页
  • 作者单位

    Institute of Optoelectronics, Ulm University, 89069 l/Im, Germany;

    Institute of Optoelectronics, Ulm University, 89069 l/Im, Germany;

    Institute of Optoelectronics, Ulm University, 89069 l/Im, Germany;

    Institute of Optoelectronics, Ulm University, 89069 l/Im, Germany;

    Institute of Optoelectronics, Ulm University, 89069 l/Im, Germany;

    Institute of Quantum Matter/Semiconductor Physics Croup, Ulm University, 89069 Ulm, Germany;

    Institute of Experimental and Applied Physics, University of Regensburg, 93040 Regensburg, Germany;

    Institute of Experimental and Applied Physics, University of Regensburg, 93040 Regensburg, Germany;

    Institute of Optoelectronics, Ulm University, 89069 l/Im, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A3. selective epitaxy; A3. semipolar quantum wells; B1. nitrides; B3. light emitting diodes;

    机译:A3。选择性外延A3。半极性量子阱;B1。氮化物B3。发光二极管;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号