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首页> 外文期刊>Journal of Crystal Growth >Crystal growth of bulk ternary semiconductors: Comparison of GaInSb growth by horizontal Bridgman and horizontal traveling heater method
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Crystal growth of bulk ternary semiconductors: Comparison of GaInSb growth by horizontal Bridgman and horizontal traveling heater method

机译:体三元半导体的晶体生长:水平布里奇曼法和水平行进加热器法GaInSb生长的比较

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摘要

Results from the growth of bulk Ga_(1-x)In_xSb crystals are presented. The primary challenge for ternary crystal growth is to control the composition and electrical resistivity while also reducing the concentration of defects. A modified horizontal traveling heater method (HTHM) growth process is described which accomplishes these goals. This method uses excess indium as a solvent, allowing growth of the ternary crystal at a given composition, below the liquidus temperature of the desired alloy. Lower temperature growth reduces the density of native defects such as gallium vacancies. The horizontal traveling heater method produces a zone-leveling effect on the alloy composition, so that a uniform composition crystal is obtained. The solute distribution achieved by HTHM is compared with a crystal grown by the horizontal Bridgman method.
机译:给出了块状Ga_(1-x)In_xSb晶体生长的结果。三元晶体生长的主要挑战是控制组成和电阻率,同时还降低缺陷的浓度。描述了一种改进的水平行进加热器方法(HTHM)的生长过程,可以实现这些目标。该方法使用过量的铟作为溶剂,使三元晶体在给定的组成下(低于所需合金的液相线温度)生长。较低的温度增长降低了诸如镓空位之类的天然缺陷的密度。水平行进加热器方法对合金成分产生区域均化效果,从而获得均匀的成分晶体。将通过HTHM获得的溶质分布与通过水平Bridgman方法生长的晶体进行比较。

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