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首页> 外文期刊>Journal of Crystal Growth >X-ray photoelectron spectroscopy study of Al- and N- co-doped p-type ZnO thin films
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X-ray photoelectron spectroscopy study of Al- and N- co-doped p-type ZnO thin films

机译：Al和N共掺杂的p型ZnO薄膜的X射线光电子能谱研究

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摘要

The chemical state of nitrogen, aluminum, oxygen and zinc in Al-N co-doped p-type ZnO thin films was investigated by X-ray photoelectron spectroscopy (XPS). N_(1s) peak were detected in both the two p-type ZnO thin films, showing two components. The higher binding energy peak may be due to the Al-N_o-H species, and the lower one perhaps derive from the (NH_2)~- cluster for the ammonia introduction. These two peaks both contribute to the p-type behavior in the ZnO films. A symmetry 74.4 eV binding energy in Al_(2ps/2) photoelectron peaks revealed an Al-N bonding state, a key factor to the co-doping method.
机译：通过X射线光电子能谱（XPS）研究了Al-N共掺杂p型ZnO薄膜中氮，铝，氧和锌的化学状态。在两个p型ZnO薄膜中均检测到N_（1s）峰，显示出两个成分。较高的结合能峰可能归因于Al-N_o-H种类，而较低的结合能峰可能来自于引入氨的（NH_2）〜-簇。这两个峰都有助于ZnO膜的p型行为。 Al_（2ps / 2）光电子峰中对称的74.4 eV结合能显示出Al-N键合状态，这是共掺杂方法的关键因素。

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  • 来源
    《Journal of Crystal Growth》 |2009年第8期|2341-2344|共4页
  • 作者

    G.D. Yuan; Z.Z. Ye; J.Y. Huang; L.P. Zhu; C.L. Perkins; S.B. Zhang;

  • 作者单位

    State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, People's Republic of China;

    State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, People's Republic of China;

    State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, People's Republic of China;

    State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, People's Republic of China;

    National Renewable Energy Laboratory, Golden, CO 80401, USA;

    National Renewable Energy Laboratory, Golden, CO 80401, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Electrical properties; A1. P-type conduction; A1. ZnO; A1. X-ray photoelectron spectroscopy;

    机译：A1。电气性能;A1。 P型传导;A1。氧化锌;A1。 X射线光电子能谱;

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