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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structure >Quantification of line-edge roughness of photoresists. Ⅱ. Scaling and fractal analysis and the best roughness descriptors
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Quantification of line-edge roughness of photoresists. Ⅱ. Scaling and fractal analysis and the best roughness descriptors

机译：光刻胶线边缘粗糙度的量化。 Ⅱ。缩放和分形分析以及最佳粗糙度描述符

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摘要

A search for the best and most complete description of line-edge roughness (LER) is presented. The root mean square (rms) value of the edge (sigma value) does not provide a complete characterization of LER since it cannot give information about its spatial complexity. In order to get this missing information, we analyze the detected line edges as found from scanning electron microscope (SEM) image analysis [see Paper Ⅰ: G. P. Patsis et al., J. Vac. Sci. Technol. B 21, 1008 (2003)] using scaling and fractal concepts. It is shown that the majority of analyzed experimental edges exhibit a self-affine character and thus the suggested parameters for the description of their roughness should be: (1) the sigma value, (2) the correlation length ξ, and (3) the roughness exponent α. The dependencies of ξ and a on various image recording and analysis parameters (magnification, resolution, threshold value, etc.) are thoroughly examined as well as their implications on the calculation of sigma when it is carried out by averaging over the sigmas of a number of segments of the edge. In particular, ξ is shown to be connected to the minimum segment size for which the average sigma becomes independent of the segment size, whereas α seems to be related to the relative contribution of high frequency fluctuations to LER.
机译：提出了对线边缘粗糙度（LER）的最佳，最完整描述的搜索。边缘的均方根（rms）值（西格玛值）无法提供LER的完整特征，因为它无法提供有关其空间复杂度的信息。为了获得该丢失的信息，我们分析了从扫描电子显微镜（SEM）图像分析中发现的检测到的线边缘[参见论文Ⅰ：G。P. Patsis等，J。Vac。科学技术。 B 21，1008（2003）]使用缩放和分形概念。结果表明，大多数被分析的实验边缘都表现出自仿射特性，因此，用于描述其粗糙度的建议参数应为：（1）sigma值，（2）相关长度ξ，以及（3）粗糙度指数α。彻底检查了ξ和a对各种图像记录和分析参数（放大率，分辨率，阈值等）的依赖性，以及它们对sigma求平均值时对sigma计算的影响。边缘的段数。特别是，ξ显示为与平均sigma无关的最小片段大小有关，而sigma则独立于片段大小，而α似乎与高频波动对LER的相对贡献有关。

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