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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structure >Nanocomposite coatings within the system Ti-B-N deposited by plasma assisted chemical vapor deposition
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Nanocomposite coatings within the system Ti-B-N deposited by plasma assisted chemical vapor deposition

机译：通过等离子体辅助化学气相沉积法沉积的系统Ti-B-N中的纳米复合涂层

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摘要

Ti-B-N coatings have been deposited by plasma assisted chemical vapor deposition (PACVD) onto tool steels and were evaluated with respect to their structure, mechanical and tribological properties. The boron content of the coatings investigated was varied from 7 to 52 at. %. All coatings were compared to single-phase TiN and TiB_2 films. For increasing boron content, a nanoscaled dual-phase structure consisting of different amounts of TiN and TiB_2 phases was found. Likewise, the hardness increased from 20 to a maximum of 36 GPa. VDI indentation as well as surface fatigue testing, where cyclic loads up to 80 kN are applied to the tool surface by cylindrical cemented carbide indenters, indicated excellent coating adhesion. Biaxial stresses were evaluated using a cantilever beam method. In ball-on-disk testing, the lowest friction coefficient of about 0.17-0.22 against a 100Cr6 ball was yielded for TiN coatings and for coatings with boron contents below 9 at. % B. Boron additions exceeding this limit resulted in increasing friction coefficients of up to 0.8. Abrasive wear rates determined using a microscale abrasion tester decreased continuously from 6.9X 10~(-13) to 8.2X 10~(-14) m~2/N with increasing boron content from 7 to 52 at. %, respectively. The results obtained indicate that PACVD Ti-B-N coatings are an excellent choice for tribological applications under severe conditions like deep drawing or cold forming.
机译：Ti-B-N涂层已通过等离子辅助化学气相沉积（PACVD）沉积到工具钢上，并对其结构，机械和摩擦学性能进行了评估。研究的涂层中的硼含量为7至52 at。 ％。将所有涂层与单相TiN和TiB_2薄膜进行比较。为了增加硼含量，发现了由不同量的TiN和TiB_2相组成的纳米级双相结构。同样，硬度从20 Gpa增加到最大36 GPa。 VDI压痕以及表面疲劳测试表明，圆柱硬质合金压头将高达80 kN的循环载荷施加到工具表面，表明涂层具有出色的附着力。使用悬臂梁法评估双轴应力。在圆盘试验中，TiN涂层和硼含量低于9 at的涂层对100Cr6球的最低摩擦系数约为0.17-0.22。 ％B。硼的添加量超过此极限会导致摩擦系数增加到0.8。随着硼含量从7 at增加到52 at，使用微型磨损测试仪确定的磨耗速率从6.9X 10〜（-13）连续降低到8.2X 10〜（-14）m〜2 / N。 ％， 分别。获得的结果表明，PACVD Ti-B-N涂层是在严酷条件下（例如深冲或冷成型）摩擦学应用的绝佳选择。

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