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首页> 外文期刊>Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures >Metastable structure and magnetism of Cr-doped AlN in AlN/TiN multilayers
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Metastable structure and magnetism of Cr-doped AlN in AlN/TiN multilayers

机译:AlN / TiN多层膜中Cr掺杂AlN的亚稳态结构和磁性

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[Cr:AlN/TiN] multilayers are prepared with various wavelengths and thicknesses of the single layers. Microstructure studies indicate that the structure of Cr:AlN is a rocksalt structure for the sample of [Cr:AlN(1.8 nm)/TiN(6.4 nm)]100. This sample is ferromagnetic in room temperature with a saturated magnetization of 2.88 emu/cm3 and remanence of 25%. These values are higher than other [Cr:AlN/TiN] multilayers with large modulation wavelengths in which the Cr:AlN is a wurzite structure. The possible origin of magnetic variation is discussed for the authors’ samples.
机译:制备具有各种波长和厚度的单层的[Cr:AlN / TiN]多层。显微组织研究表明,对于[Cr:AlN(1.8 nm)/ TiN(6.4 nm)] 100样品,Cr:AlN的结构为岩盐结构。该样品在室温下为铁磁性,饱和磁化强度为2.88 emu / cm3,剩磁为25%。这些值高于具有较大调制波长的其他[Cr:AlN / TiN]多层,其中Cr:AlN为纤锌矿结构。作者的样本讨论了磁变化的可能起源。

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