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首页> 外文期刊>トライボロジスト >榦薄ダイヤモンドライクカーボン（dlc）膜のマイクロトライポロジー特性
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榦薄ダイヤモンドライクカーボン（dlc）膜のマイクロトライポロジー特性

机译：类金刚石薄碳膜的微摩擦学特性

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摘要

Micro-tribological properties such as nanowear resistance and low load reciprocating friction of extremely thin DLC (Diamond-like carbon) films deposited by bend type FCVA (Filtered cathodic vacuum arc) and ECR (Electron cyclotron resonance)-CVD (Chemical vapor deposition) techniques were evaluated. Structure and composition of these DLC films were evaluated using Raman spectroscopy, TEM (Transmission electron microscopy) and AES (Auger electron spectroscopy). These analyses show that FCVA-DLC film has the tetrahedral structure. Nanowear properties were evaluated by AFM (Atomic force microscopy). FCVA-DLC film shows superior nanowear resistance. Wear depths of 1- and 2-nm-thick FCVA-DLC films are extremely shallow as less than 1 nm. However, wear depths of ECR-CVD-DLC are deeper and reach to its thickness after, few slidings. From the 10 mN-load reciprocating friction test, friction coefficients of nm-thick ECR-CVD-DLC films are fluctuated, and their damages are greater than those of FCVA-DLC films. From the friction properties dependence on film thickness, friction coefficient of FCVA is low and stable. In contrast, the friction coefficients of ECR-CVD-DLC films with thinner than 1.0 nm are as high as that of Si(100) substrates. These results reveal the excellent wear resistance of extremely thin films deposited by FCVA.%FCVA-DLC膜およびECR-CVD-DLC膜の極薄rnについて微小荷重領域の摩擦摩耗特性を評価し，以rn下の結果を得た．rn（1）AFMを用いたナノ摩耗試験で目標膜厚1.0nm程rn度のDLC膜の特性評価を実現した．FCVA-DLCrn膜は目標膜厚1.0nm以上でECR-CVD-DLC膜とrn比べて高い耐摩耗性を示す．ECR-CVD-DLC膜rnは膜自体の摩耗も大きく摩擦により徐々に増大rnする傾向が見られる．
机译：通过弯曲型FCVA（过滤阴极真空电弧）和ECR（电子回旋共振）-CVD（化学气相沉积）技术沉积的极薄DLC（类金刚石碳）薄膜的纳米级耐磨性和低负荷往复摩擦等微摩擦学特性被评估。使用拉曼光谱，TEM（透射电子显微镜）和AES（俄歇电子能谱）评估这些DLC膜的结构和组成。这些分析表明，FCVA-DLC膜具有四面体结构。通过AFM（原子力显微镜）评估纳米磨损性能。 FCVA-DLC薄膜显示出优异的纳米耐磨性。 1纳米和2纳米厚的FCVA-DLC薄膜的磨损深度非常浅，小于1纳米。但是，ECR-CVD-DLC的磨损深度更深，滑动很少后达到其厚度。从10 mN负载的往复摩擦试验来看，纳米厚的ECR-CVD-DLC薄膜的摩擦系数发生了波动，其损坏程度大于FCVA-DLC薄膜。从取决于膜厚度的摩擦性能来看，FCVA的摩擦系数低且稳定。相反，厚度小于1.0 nm的ECR-CVD-DLC膜的摩擦系数与Si（100）基板的摩擦系数一样高。这些结果显示了FCVA沉积的极薄膜的优异耐磨性。％FCVA-DLC膜およびECR-CVD-DLC膜の极薄rnについて微小荷重领域の摩擦摩耗特性を评価し，以rn下の结果を得（．rn（1）AFMを用いたナノ摩耗试験で目标膜厚1.0nm程rn度のDLC膜の特性评価を実现価を実．FCVA-DLCrn膜は目标膜厚1.0nm以上でECR-CVD-DLC膜ECR-CVD-DLC膜rnは膜自体の摩耗も大きく摩擦により徐々に増大するする倾向が见られる。

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