Mechatronics in semiconductor fab automation

Joel Galliher

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Mechatronics in semiconductor fab automation

机译：机电一体化在半导体晶圆厂自动化中的应用

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Historically, the semiconductor industry has been driven by physics and chemistry. These are the disciplines that have led to perfecting manufacturing processes that, in turn, have brought remarkable advances in microelectronic technology. In semiconductor manufacturing, the focus has mainly been on the process- essentially in the deposition and etching chambers. What happened outside was far less important.

机译：从历史上看，半导体行业一直由物理和化学驱动。这些学科导致了制造工艺的完善，进而使微电子技术取得了显着进步。在半导体制造中，重点主要放在工艺上，基本上是在沉积室和蚀刻室中。外面发生的事情远没有那么重要。

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《Machine Design》 |2007年第21期|p.73|共1页
作者
Joel Galliher;
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收录信息美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类机械设计;
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专利

1. Fabulous MESs and C/CS: an overview of semiconductor fab automation systems [J] . SHENG-LUEN CHUMG, MUDER JENG IEEE Robotics & Automation Magazine . 2004,第1期

机译：出色的MES和C / CS：半导体晶圆厂自动化系统概述
2. Strategy and metrics for wafer handling automation in legacysemiconductor fab [J] . Guldi R.L., Paradis D.E., Whitfield M.T., IEEE Transactions on Semiconductor Manufacturing . 1999,第1期

机译：传统半导体工厂中晶圆处理自动化的策略和指标
3. Strategy and metrics for wafer handling automation in legacy semiconductor fab [J] . Guldi R.L., Paradis D.E. IEEE Transactions on Semiconductor Manufacturing . 1999,第1期

机译：传统半导体工厂中晶圆处理自动化的策略和指标
4. Use of simulation studies to overcome key challenges in the fab automation of a 300 mm power semiconductor pilot line comprising thin-wafer processing [C] . Schneider Germar, Wagner Thomas, Kraft Martin Annual SEMI Advanced Semiconductor Manufacturing Conference . 2015

机译：利用仿真研究来克服300毫米功率半导体中试线（包括薄晶圆处理）的工厂自动化中的关键挑战
5. Orthogonal Spatial Material Flow structures with application to 300mm semiconductor fab automation. [D] . Ting, Juu-Hwa. 1999

机译：正交空间材料流结构及其在300mm半导体工厂自动化中的应用。
6. Centro-Apical Self-Organization of Organic Semiconductors in a Line-Printed Organic Semiconductor: Polymer Blend for One-Step Printing Fabrication of Organic Field-Effect Transistors [O] . Su Jin Lee, Yong-Jae Kim, So Young Yeo, -1

机译：线印刷有机半导体中有机半导体的心尖自组织：用于一步法制造有机场效应晶体管的聚合物共混物
7. Integrating Dynamic Fab Capacity And Automation Models For 300mm Semiconductor Manufacturing [O] . J. A. Joines, R. R. Barton, K. Kang, 2007

机译：集成用于300mm半导体制造的动态Fab能力和自动化模型

Mechatronics in semiconductor fab automation

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