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首页> 外文期刊>Mechatronics, IEEE/ASME Transactions on >Design and Robust Repetitive Control of a New Parallel-Kinematic XY Piezostage for Micro/Nanomanipulation
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Design and Robust Repetitive Control of a New Parallel-Kinematic XY Piezostage for Micro/Nanomanipulation

机译：用于微/纳米操纵的新型并联运动XY压电平台的设计和鲁棒重复控制

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摘要

This paper presents mechanism and controller design procedures of a new piezoactuated flexure XY stage for micro-anomanipulation applications. The uniqueness of the proposed stage lies in that it possesses an integrated parallel, decoupled, and stacked kinematical structure, which owns such properties as identical dynamic behaviors in X and Y axes, decoupled input and output motion, single-input-single-output (SISO) control, high accuracy, and compact size. Finite element analysis (FEA) was conducted to predict static performance of the stage. An XY stage prototype was fabricated by wire electrical discharge machining (EDM) process from the alloy material Al7075. Based on the identified plant transfer function of the micropositioning system, an $H_infty$ robust control combined with a repetitive control (RC) was adopted to compensate for the unmodeled piezoelectric nonlinearity. The necessity of using such a combined control is also investigated. Experimental results demonstrate that the $H_infty$ plus RC scheme improves the tracking response by 67% and 28% compared to the stand-alone $H_infty$ for 1-D and 2-D periodic positioning tasks, respectively. Thus, the results illustrate the effectiveness of the proposed mechanism design and control approach.
机译：本文介绍了一种用于微/纳米夹持应用的新型压电驱动挠曲XY工作台的机制和控制器设计程序。所提议阶段的独特之处在于它具有集成的并行，解耦和堆叠的运动学结构，该结构具有诸如X和Y轴上相同的动态行为，解耦的输入和输出运动，单输入单输出（ SISO）控制，高精度和紧凑的尺寸。进行了有限元分析（FEA）以预测平台的静态性能。利用合金材料Al7075通过电火花加工（EDM）工艺制造了XY工作台原型。基于已确定的微定位系统的植物传递函数，采用了$ H_infty $鲁棒控制与重复控制（RC）相结合的方法来补偿未建模的压电非线性。还研究了使用这种组合控件的必要性。实验结果表明，与单独的$ H_infty $相比，针对1D和2D周期性定位任务的$ H_infty $和RC方案分别将跟踪响应提高了67％和28％。因此，结果说明了所提出的机构设计和控制方法的有效性。

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